Device for picking up and sorting crystal grains

Abstract

Sorter of picking up crystal grains includes multiple collection racks with basins. Each collection rack is corresponding to different sorts of qualities of crystal grains. Adsorption header picks up crystal grains in same sort of quality to a basin. When crystal grains are full in a basin, a basin transportation module carries the basin to a collection rack. Thus, crystal grains are picked up according to different qualities to relevant collection rack continuously till all crystal grains are picked up. The invention increases picking up and sorting efficiency, and preventing issue of mixed up crystal grains.

Description

technical field [0001] The present invention relates to a pick and place device for crystal grains, in particular to a pick and place device for continuous pick and place. Background technique [0002] When manufacturing an integrated circuit on a wafer, it needs to go through quite a lot of semiconductor process steps. The quality of each manufactured integrated circuit is often not the same; even the integrated circuits located in each die (or called chip chip) of the same wafer have different qualities. Therefore, before cutting out the die, each die on the wafer must be tested; according to the test results, it is divided into several quality categories. Taking the example shown in FIG. 1, after each die 12 on the wafer 10 is tested, it is marked with a classification value such as 1 to 3 according to its quality; usually, the classification values ​​of these die 12 are stored in the testing equipment. in memory. [0003] The sorted wafers 10 can be diced, that is, sc...

AI Technical Summary

Problems solved by technology

[0008] Another object of the present invention is to solve the mixed crystal problem caused by personnel negligence and failure to immediately take out the carrier carrying the crystal grains

Images