Air spring vibration insulating foundation with gas lubrication unit

A technology of gas lubrication and air spring, which is applied in the direction of non-rotational vibration suppression, can solve the problems of horizontal and vertical vibration isolation, etc., and achieve the effect of overcoming the poor bearing capacity and maintaining the inherent bearing capacity

Inactive Publication Date: 2009-10-28
HARBIN INST OF TECH
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  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

It can greatly improve the horizontal and vertical ultra-low frequency vibration isolation performance of the vibration isolation foundation without changing the bearing capacity of the vibration isolation foundation, effectively solving the problem that the horizontal and longitudinal vibration isolation of the current air spring vibration isolation foundation cannot be balanced

Method used

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  • Air spring vibration insulating foundation with gas lubrication unit
  • Air spring vibration insulating foundation with gas lubrication unit
  • Air spring vibration insulating foundation with gas lubrication unit

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Embodiment Construction

[0022] The system structure and working principle of an air spring vibration isolation foundation with a gas lubrication unit according to the present invention are described in detail in conjunction with the embodiments and accompanying drawings as follows:

[0023] An embodiment of an air spring vibration isolation foundation with a gas lubrication unit of the present invention, the structure is as follows figure 1 As shown, it includes: base body 5, multiple air springs 4, multiple gas lubricating units 3, the series structure composed of gas lubricating units 3 and air springs 4 supports the base body 5, and the side of the base body 5 is arranged with a low-stiffness centralizing device 6.

[0024] Since the lateral friction of the gas lubrication unit 3 approaches zero, its equivalent lateral stiffness in series with the air spring 4 is zero, and the equivalent longitudinal stiffness is:

[0025] k = k ...

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Abstract

An air spring vibration isolation foundation with a gas lubrication unit, the invention belongs to an air spring vibration isolation foundation with a gas lubrication unit. However, the current air spring vibration isolation foundation cannot balance the transverse and longitudinal ultra-low frequency vibration isolation performance due to the mutual coupling of the air spring's transverse and longitudinal stiffness. The composition of this product includes: base body (5), a set of air springs (4), air supply system (1), height control system (2), multiple air lubrication units (3) and low stiffness centralizing device, air supply system ( 1) Connected to the input end of the height control system (2), the output end of the height control system (2) is connected to each air spring (4) respectively, the gas lubrication unit (3) is directly connected to the air supply system (1), and the gas lubrication The unit (3) and the air spring (4) are installed under the base (5) in series, and the gas lubrication unit (3) and the air spring (4) form a series structure to support the base, and the side of the base (5) is equipped with a low-rigidity centralizing device (6). The invention is suitable for super large air spring vibration isolation foundation.

Description

technical field [0001] The invention belongs to the field of ultra-low frequency vibration isolation, in particular to an air spring vibration isolation foundation with a gas lubricating unit. Background technique [0002] The air spring vibration isolation foundation is widely used in the field of vibration isolation due to its good low-frequency vibration isolation effect, insensitivity to load changes, and long service life. With the continuous improvement of ultra-precision machining and measurement, micro-nano technology and VLSI manufacturing precision, higher requirements are put forward for the ultra-low frequency performance of vibration isolation. However, the current air spring vibration isolation foundation cannot balance the transverse and longitudinal ultra-low frequency vibration isolation performance due to the mutual coupling of the air spring's transverse and longitudinal stiffness, which largely limits its further application in the field of ultra-low freq...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F16F15/04
Inventor 谭久彬刘彦姚绍明杨文国曹刚
Owner HARBIN INST OF TECH
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