Air spring vibration insulating foundation with gas-film lubrication unit

A gas-lubricated, air-spring technology, applied in non-rotational vibration suppression and other directions, can solve the problem of inability to balance horizontal and vertical vibration isolation, and achieve the effect of overcoming poor bearing capacity and maintaining inherent bearing capacity.

Inactive Publication Date: 2008-01-02
HARBIN INST OF TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

It can greatly improve the horizontal and vertical ultra-low frequency vibration isolation performance of the vibration isolation foundation without changing the bearing capacity of the vibration isolation foundation, effectively solving the problem that the horizontal and longitudinal vibration isolation of the current air spring vibration isolation foundation cannot be balanced

Method used

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  • Air spring vibration insulating foundation with gas-film lubrication unit
  • Air spring vibration insulating foundation with gas-film lubrication unit
  • Air spring vibration insulating foundation with gas-film lubrication unit

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Embodiment Construction

[0022] The system structure and working principle of an air spring vibration isolation foundation with a gas lubrication unit according to the present invention are described in detail in conjunction with the embodiments and accompanying drawings as follows:

[0023] An embodiment of an air spring vibration isolation foundation with a gas lubrication unit of the present invention, the structure is shown in Figure 1, including: a base 5, a plurality of air springs 4, a plurality of gas lubrication units 3, the gas lubrication unit 3 and The series structure composed of air springs 4 supports the base body 5, and a low-rigidity centralizing device 6 is arranged on the side of the base body 5.

[0024] Since the lateral friction of the gas lubrication unit 3 approaches zero, its equivalent lateral stiffness in series with the air spring 4 is zero, and the equivalent longitudinal stiffness is:

[0025] k = k ...

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Abstract

The invention discloses an air spring vibration isolation base with gas lubricating unit, which is characterized by the following: comprising base (5), a group of air spring (4), air feed system (1), height controlled system (2), a plurality of gas lubricating unit (3)and erection device with low rigidity; connecting the air feed system (1)to the inputting end of the height controlled system (2); connecting the outputting end of the height controlled system (2)to each air spring (4)separately; connecting the gas lubricating unit (3)to the air feed system (1)directly; cascading the gas lubricating unit (3)and the air spring (4); assembling under the base (5)to support the base; layouting erection device (6)with low hardness at the lateral of the base (5). This invention is fit for super air spring vibration isolation base.

Description

technical field [0001] The invention belongs to the field of ultra-low frequency vibration isolation, in particular to an air spring vibration isolation foundation with a gas lubricating unit. Background technique [0002] The air spring vibration isolation foundation is widely used in the field of vibration isolation due to its good low-frequency vibration isolation effect, insensitivity to load changes, and long service life. With the continuous improvement of ultra-precision machining and measurement, micro-nano technology and VLSI manufacturing precision, higher requirements are put forward for the ultra-low frequency performance of vibration isolation. However, the current air spring vibration isolation foundation cannot balance the transverse and longitudinal ultra-low frequency vibration isolation performance due to the mutual coupling of the air spring's transverse and longitudinal stiffness, which largely limits its further application in the field of ultra-low freq...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F16F15/04
Inventor 谭久彬刘彦姚绍明杨文国曹刚
Owner HARBIN INST OF TECH
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