The invention relates to a two-
stroke hybrid-drive micro-nano indentation / scratch testing device, belonging to the technical field of precision sensors and precision instruments. The device includes ahybrid drive unit, a load detection and range changing unit, a displacement detection unit, a sample moving unit, a base, a support plate and a guide rail-sliding block
assembly.
Hybrid driving is achieved by utilizing a
voice coil motor and a piezoelectric stack-flexible hinge. Through adjusting a fitting relationship between a shielding case (rack) and a
force sensor, and through adopting segmented load detection and range changing, different loading strokes and precise measurement of indentation load can be achieved by combination with the displacement detection unit, and the sample movingunit is integrated to achieve sample indentation position changing and scratch testing. A
modular design concept is adopted, and the device is compact in structure, safe, reliable, capable of achieving conventional nano indentation / scratch testing for
mass metal materials, film materials, composite materials, and the like, capable of performing large-
stroke loading tests for
soft materials such as biological tissues, and high in practicability.