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Induction cold crucible zone-refining equipment and method for preparing high-purity and hyperpure materials

A technology for purification of ultra-pure materials and zone melting, applied in self-zone melting methods, lighting and heating equipment, chemical instruments and methods, etc., can solve problems such as pollution, low production efficiency of high-purity and ultra-pure materials, and achieve no crucible pollution effect

Active Publication Date: 2011-08-31
SHENZHEN SUMMIT LEVITATION METALLURGICAL SCI & TECHN
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0010] The technical problem to be solved by the present invention is to overcome the defects of the existing zone melting purification technology that produces pollution and the production efficiency of high-purity and ultra-pure materials is very low, and propose a pollution-free zone melting purification technology that does not use a crucible (such as floating zone melting technology) equipment and preparation methods with high efficiency compared to the preparation of high-purity ultra-pure materials

Method used

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  • Induction cold crucible zone-refining equipment and method for preparing high-purity and hyperpure materials
  • Induction cold crucible zone-refining equipment and method for preparing high-purity and hyperpure materials
  • Induction cold crucible zone-refining equipment and method for preparing high-purity and hyperpure materials

Examples

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Effect test

Embodiment 1

[0064] Example 1: Cu is purified by cold crucible zone melting technology to prepare ultra-pure Cu

[0065] A vertically installed vacuum chamber 1 is made of a φ60×1200mm quartz tube. Cold crucible 2 uses 16 special-shaped copper tubes 400 according to Figure 4 Assembled with the form shown in Figure 5. The inner diameter of the crucible is 30 mm, the height is 800 mm, and a material rod of φ30 mm×800 mm with a purity of 4N, that is, a red copper rod 500 is placed in the cold crucible 2 . Three single-layer three-turn induction coils 3 are spaced 50mm apart from each other to surround the quartz tube, and are connected to a high-frequency power supply (frequency 300kc). These induction coils 3 can move synchronously along the quartz tube.

[0066] After vacuuming (2×10-3Pa) and filling with 5N high-purity argon, power is sent to the induction coils 3, and the three induction coils 3 are driven to move from bottom to top after the melting zone 200 is formed. The width of ...

Embodiment 2

[0068] Embodiment 2: An example of purifying and preparing a high-purity titanium-coated target material.

[0069] The purity of the raw material is 4N, and it is required to obtain a sputtering target with a purity of 5N and a size of φ200×6mm.

[0070] The vacuum chamber 1 is made of stainless steel. The crucible wall 22 of the cold crucible 2 is assembled with 24 pieces of copper plates, and the outer surface of the plates is welded with a copper tube 400 of φ12mm, and the copper tube 400 is connected with the inlet water jacket 24 and the return water jacket 26.

[0071] The crucible wall 22 has an inner diameter of 205mm and a height of 600mm. A water-cooled red copper crucible bottom is installed at the lower end of the crucible wall 22 . The raw titanium rods are loaded into crucibles to be purified.

[0072] A double-layer inductor 3 is installed around the cold crucible 2 at the lower end of the cold crucible 2, and its upper layer is 2 turns, and the lower floor i...

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Abstract

The invention relates to induction cold crucible zone-refining equipment for preparing high-purity and hyperpure materials, which comprises a vacuum chamber, a cold crucible and at least one inductor, wherein the cold crucible serving as a red copper crucible is arranged in the vacuum chamber and comprises a crucible wall, a water inlet water jacket and a water return water jacket; a plurality of crucible valves which are parallel to a crucible axis are formed on the crucible wall, and circulating cooling water is introduced into each crucible valve; the water inlet water jacket is arranged on the lower side of the crucible wall, and the water return water jacket is arranged on the upper side of the crucible wall; and the at least one inductor winds outside the cold crucible, and the number of turns of the inductor is small in an upper layer and big in a lower layer. The induction cold crucible zone-refining equipment for preparing the high-purity and hyperpure materials has high efficiency.

Description

technical field [0001] The invention relates to a zone melting purification technology for preparing high-purity and ultra-pure materials, in particular to equipment and a method for preparing high-purity and ultra-pure materials by induction cold crucible zone melting technology. Background technique [0002] Generally, metals with a purity of 3N to 5N (99.9% to 99.999%) are called high-purity metals, and metals with a purity of more than 5N are called ultra-pure metals (N in the text means 9). In the past, high-purity and ultra-pure materials were only used in scientific research and cutting-edge technology, and were used in very small amounts in industry. However, as the world enters the high-tech era, high-purity and ultra-pure materials have become the basic materials for many high-tech industries. [0003] For example, before the 21st century, sputtering Al targets and sputtering Cu targets for chip thin films in the information industry need to reach a purity of 4N-5...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F27B14/04F27B14/06F27B14/08C30B13/00C22B9/02
CPCY02P10/20Y02P10/25
Inventor 李碚张森
Owner SHENZHEN SUMMIT LEVITATION METALLURGICAL SCI & TECHN