Unlock instant, AI-driven research and patent intelligence for your innovation.

Induction cold crucible zone-refining equipment and method for preparing high-purity and hyperpure materials

A technology for purification of ultra-pure materials and zone melting, applied in self-zone melting methods, lighting and heating equipment, chemical instruments and methods, etc., can solve problems such as pollution, low production efficiency of high-purity and ultra-pure materials, and achieve no crucible pollution effect

Active Publication Date: 2012-10-03
SHENZHEN SUMMIT LEVITATION METALLURGICAL SCI & TECHN
View PDF5 Cites 1 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0010] The technical problem to be solved by the present invention is to overcome the defects of the existing zone melting purification technology that produces pollution and the production efficiency of high-purity and ultra-pure materials is very low, and propose a pollution-free zone melting purification technology that does not use a crucible (such as floating zone melting technology) equipment and preparation methods with high efficiency compared to the preparation of high-purity ultra-pure materials

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Induction cold crucible zone-refining equipment and method for preparing high-purity and hyperpure materials
  • Induction cold crucible zone-refining equipment and method for preparing high-purity and hyperpure materials
  • Induction cold crucible zone-refining equipment and method for preparing high-purity and hyperpure materials

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0064] Example 1: Purify Cu by cold crucible zone melting technology to prepare ultrapure Cu

[0065] use The quartz tube is made into a vacuum chamber 1 installed vertically. Cold crucible 2 uses 16 special-shaped copper tubes 400 according to Figure 4 Assembled with the form of Figure 5. The inner diameter of the crucible is 30mm, the height is 800mm, and the purity is 4N The red copper rod 500 is placed in the cold crucible 2. Three single-layer three-turn induction coils 3 are surrounded by a quartz tube with an interval of 50mm from each other, and are connected to a high-frequency power supply (frequency of 300kc). These induction coils 3 can move synchronously along the quartz tube.

[0066] After being evacuated (2×10-3Pa) and filled with 5N high-purity argon, power is sent to the induction coil 3, and three induction coils 3 are driven to move simultaneously from bottom to top after the molten zone 200 is formed. The width of the controlled melting zone is about 60mm...

Embodiment 2

[0068] Example 2: An example of purifying and preparing a high-purity titanium coating target.

[0069] The purity of the raw material is 4N, the purity required is 5N, and the size is Sputtering target.

[0070] The vacuum chamber 1 is made of stainless steel. The crucible wall 22 of the cold crucible 2 is assembled with 24 red copper plates, and the outer surface of the plate is welded The copper pipe 400 is connected to the inlet water jacket 24 and the return water jacket 26.

[0071] The crucible wall 22 has an inner diameter of 205mm and a height of 600mm. At the lower end of the crucible wall 22 is a water-cooled copper crucible bottom. The raw material titanium rod is put into the crucible to be purified.

[0072] Install a double-layer inductor 3 around the cold crucible 2 at the lower end of the cold crucible 2, the upper layer has 2 turns, and the lower layer has 4 turns (such as Figure 8 Shown). The frequency of the high-frequency electromagnetic field is 20kc.

[007...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
purityaaaaaaaaaa
heightaaaaaaaaaa
Login to View More

Abstract

The invention relates to induction cold crucible zone-refining equipment for preparing high-purity and hyperpure materials, which comprises a vacuum chamber, a cold crucible and at least one inductor, wherein the cold crucible serving as a red copper crucible is arranged in the vacuum chamber and comprises a crucible wall, a water inlet water jacket and a water return water jacket; a plurality ofcrucible valves which are parallel to a crucible axis are formed on the crucible wall, and circulating cooling water is introduced into each crucible valve; the water inlet water jacket is arranged on the lower side of the crucible wall, and the water return water jacket is arranged on the upper side of the crucible wall; and the at least one inductor winds outside the cold crucible, and the number of turns of the inductor is small in an upper layer and big in a lower layer. The induction cold crucible zone-refining equipment for preparing the high-purity and hyperpure materials has high efficiency.

Description

Technical field [0001] The invention relates to a zone melting purification technology for preparing high-purity and ultra-pure materials, in particular to equipment and a method for preparing high-purity and ultra-pure materials by using induction cold crucible zone melting technology. Background technique [0002] Generally, metals with a purity of 3N to 5N (ie 99.9% to 99.999%) are referred to as high-purity metals, and metals with a purity of more than 5N are ultra-pure metals (N in the text means 9). In the past, high-purity and ultra-pure materials were only used in scientific research and cutting-edge technology, and the amount in the industry was very small. However, as the world enters the high-tech era, high-purity and ultra-pure materials have become the basic materials for many high-tech industries. [0003] For example, before the 21st century, the sputtering Al target and the sputtering Cu target for preparing the chip film of the information industry need to reach a...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): F27B14/04F27B14/06F27B14/08C30B13/00C22B9/02
CPCY02P10/20Y02P10/25
Inventor 李碚张森
Owner SHENZHEN SUMMIT LEVITATION METALLURGICAL SCI & TECHN