Manufacture method of optical wave guide coupling structure

A technology for optical waveguide coupling and manufacturing methods, which is applied in the direction of light guides, optics, and optical components, can solve problems such as the impact of optical waveguide transmission performance, and achieve the effects of reducing density, improving transmission performance, and improving layout

Active Publication Date: 2012-03-21
SHANGHAI HUAHONG GRACE SEMICON MFG CORP
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Problems solved by technology

[0005] However, with the continuous reduction of the feature size of the device and the continuous improvement of the integration level of the chip, in the existing planar optical waveguide integration technology, the density of the optical waveguide formed on the silicon-on-insulator substrate continues to increase and the application of the curved optical waveguide. The transmission performance of the waveguide is greatly affected

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  • Manufacture method of optical wave guide coupling structure
  • Manufacture method of optical wave guide coupling structure
  • Manufacture method of optical wave guide coupling structure

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Embodiment Construction

[0027] In the process of making the optical waveguide, the inventor found that with the continuous reduction of the feature size of the device, the integration level of the chip is continuously improved. In the existing planar optical waveguide integration technology, in order to improve the utilization rate per unit area of ​​the silicon on insulator substrate , the density of the optical waveguides formed on the silicon-on-insulator substrate continues to increase, making the dielectric layer between the optical waveguides become thinner and thinner, and even closely adjacent to each other, resulting in light interference between the optical waveguides, affect device stability. In addition, when the curved optical waveguide is used in the planar integrated optical waveguide technology, the curved optical waveguide is likely to cause light transmission loss and affect the light transmission performance.

[0028] For this reason, the inventor proposes a method for fabricating ...

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Abstract

A manufacture method of an optical wave guide coupling structure comprises the following steps: providing a silicone substrate on an insulator, the silicon substrate on the insulator comprises a base layer, an oxidizing buried layer and a single crystalline silicon layer which are laminated in sequence; etching the single crystalline silicon layer till the oxidizing buried layer surface is exposed, and at least one lower layer optical wave guide is formed; etching the lower layer optical wave guide, grooves and protrusions which are arranged in stagger mode are formed on one of the end portions of the lower layer optical wave guide, and the grooves and the protrusions form a lower layer cycle grating; forming a first medium layer which is covered on the lower layer optical wave guide and the lower layer cycle grating; and forming the upper layer optical wave guide and an upper cycle grating on the first medium layer, the position of the upper layer cycle grating corresponds to the position of the lower layer cycle grating, and the upper cycle grating is located at one end portion of the upper layer optical wave guide. The manufacture method of the optical wave guide coupling structure improves layout of optical wave guides and transmission performance of the optical wave guides.

Description

technical field [0001] The invention relates to the field of semiconductor manufacturing, and more particularly to a method for manufacturing an optical waveguide coupling structure. Background technique [0002] An optical waveguide is a guiding structure that transmits optical frequency electromagnetic waves made of an optically transparent medium (such as quartz glass). The transmission principle of the optical waveguide is that the total reflection phenomenon of the electromagnetic wave confines the light wave to propagate in the waveguide and its surrounding limited area on the medium interface with different refractive indices. [0003] Among the many optical waveguide materials used in the communication band, silicon-on-insulator materials are easy to produce submicron low-loss optical waveguides due to their strong light confinement ability, and the preparation process is compatible with the fabrication process of microelectronic integrated circuits, which greatly T...

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Application Information

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IPC IPC(8): G02B6/136G02B6/122
Inventor仇超
OwnerSHANGHAI HUAHONG GRACE SEMICON MFG CORP