Surface acoustic wave gas sensor based on two-dimensional phonon crystal reflecting grating

Abstract

The invention provides a surface acoustic wave gas sensor based on a two-dimensional phonon crystal reflecting grating, belonging to a novel gas sensor structure in the technical field of surface acoustic waves. The surface acoustic wave gas sensor based on a two-dimensional phonon crystal reflecting grating adopts a single-ended resonator structure; two-dimensional phonon crystals composed of a gas sensory semiconductor metal oxide and an air column are used as reflecting gratings at the two ends of the resonator; the phonon crystal reflecting grating has double functions of gas sensing and reflection; the two-dimensional air column phonon crystal gas sensor structure has the characteristics of large surface area, high sensitivity and the like; the two-dimensional phonon crystal reflecting grating is higher than the traditional one-dimensional metal strip reflecting grating in reflection efficiency; and meanwhile, the size of the reflecting grating is reduced, thereby being very favorable for obtaining a surface acoustic wave gas sensor with a high integration level.

Description

technical field [0001] The invention relates to a surface acoustic wave gas sensor using a two-dimensional phononic crystal composed of a gas-sensitive semiconductor metal oxide and an air column as a reflection grid at both ends of a resonator to obtain a surface acoustic wave gas sensor device with excellent performance. surface wave technology. Background technique [0002] The surface acoustic wave gas sensor has the characteristics of high precision, strong anti-interference ability, high sensitivity, easy integration, and intelligence, and is widely used in the sensitive detection of different gases such as methanol, acetone, and water vapor (see Sun Lei et al., Dalian University of Technology Master's Thesis, 2005). In 1979, H.Wohltjen and others first reported the chemical vapor sensor based on surface acoustic wave technology. The oscillation frequency of the surface wave oscillator realizes the detection of gas (see Sun Lei et al., Dalian University of Technology...

AI Technical Summary

Problems solved by technology

Among them, the surface acoustic wave resonator has the characteristics of high quality factor, low loss and good frequency stability, but the multiple reflections of the sound wave and the influence of the film material on the sound wave absorption are much greater than the delay line type, resulting in the detection of the sensor Instability (see He Shitang et al., Instrument Technology and Sensors, 2009, Supplement: 117-120)

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