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Aluminum-silver multilayer broadband reflection film based on aluminum oxide interlayer

A technology of aluminum oxide film and intermediate layer, applied in the direction of coating, layered products, metal layered products, etc., can solve the problems of poor environmental adaptability, low reflectivity of aluminum film, low reflectivity of silver film, etc., to improve the environment Adaptability, the effect of suppressing reflectance decay

Inactive Publication Date: 2015-03-25
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] The purpose of the present invention is to solve the problem of low reflectance of aluminum film in the visible band and low reflectance of silver film in the ultraviolet band and poor environmental adaptability in the prior art, and provide an aluminum-silver multilayer broadband reflective film based on an aluminum oxide intermediate layer

Method used

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  • Aluminum-silver multilayer broadband reflection film based on aluminum oxide interlayer
  • Aluminum-silver multilayer broadband reflection film based on aluminum oxide interlayer

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0034]The aluminum-silver multilayer broadband reflective film based on the aluminum oxide intermediate layer is composed of the substrate 1, the first aluminum oxide film 2 with a physical thickness of 20nm, the first aluminum film 3 with a physical thickness of 45nm, and the second aluminum film with a physical thickness of 2nm, which are arranged in sequence from bottom to top. Aluminum dioxide film 4, a first silver film 5 with a physical thickness of 15 nm, a third aluminum oxide film 6 with a physical thickness of 2 nm, a second aluminum film 7 with a physical thickness of 45 nm, and a fourth aluminum oxide film 8 with a physical thickness of 2 nm , the second silver film 9 with a physical thickness of 15nm and the fifth aluminum oxide film 10 with a physical thickness of 4nm, wherein the purity of aluminum oxide, aluminum and silver are all above 99.9%.

[0035] After testing, the aluminum-silver multilayer broadband reflective film based on the alumina interlayer of Exa...

Embodiment 2

[0037] The aluminum-silver multilayer broadband reflective film based on the aluminum oxide intermediate layer is composed of a substrate 1, a first aluminum oxide film 2 with a physical thickness of 10 nm, a first aluminum film 3 with a physical thickness of 30 nm, and a second aluminum film with a physical thickness of 1 nm. Aluminum dioxide film 4, a first silver film 5 with a physical thickness of 20 nm, a third aluminum oxide film 6 with a physical thickness of 1 nm, a second aluminum film 7 with a physical thickness of 50 nm, and a fourth aluminum oxide film 8 with a physical thickness of 1 nm , the second silver film 9 with a physical thickness of 10nm and the fifth aluminum oxide film 10 with a physical thickness of 3nm, wherein the purity of aluminum oxide, aluminum and silver are all above 99.9%.

[0038] After testing, the aluminum-silver multilayer broadband reflective film based on the alumina interlayer of Example 1 has relatively high reflection from the ultravio...

Embodiment 3

[0040] The aluminum-silver multilayer broadband reflective film based on the aluminum oxide intermediate layer is composed of the substrate 1, the first aluminum oxide film 2 with a physical thickness of 30nm, the first aluminum film 3 with a physical thickness of 50nm, and the second aluminum film with a physical thickness of 3nm, which are arranged in sequence from bottom to top. Aluminum dioxide film 4, a first silver film 5 with a physical thickness of 10 nm, a third aluminum oxide film 6 with a physical thickness of 3 nm, a second aluminum film 7 with a physical thickness of 30 nm, and a fourth aluminum oxide film 8 with a physical thickness of 3 nm , the second silver film 9 with a physical thickness of 20nm and the fifth aluminum oxide film 10 with a physical thickness of 5nm, wherein the purity of aluminum oxide, aluminum and silver are all above 99.9%.

[0041] After testing, the aluminum-silver multilayer broadband reflective film based on the alumina interlayer of Ex...

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Abstract

The invention discloses an aluminum-silver multilayer broadband reflection film based on an aluminum oxide interlayer and belongs to the technical field of thin film deposition. The aluminum-silver multilayer broadband reflection film solves the problems that in the prior art, an aluminum film is low in reflectivity at the visible band, a silver film is low in reflectivity at the ultraviolet band, and the environmental adaptability is poor. The aluminum-silver multilayer broadband reflection film comprises a substrate, a first aluminum oxide film, a first aluminum film, a second aluminum oxide film, a first silver film, a third aluminum oxide film, a second aluminum film, a fourth aluminum oxide film, a second silver film and a fifth aluminum oxide film, wherein the substrate, the first aluminum oxide film, the first aluminum film, the second aluminum oxide film, the first silver film, the third aluminum oxide film, the second aluminum film, the fourth aluminum oxide film, the second silver film and the fifth aluminum oxide film are arranged compactly in sequence from bottom to top, cover the ultraviolet band, the visible band and the infrared band and all have high reflectivity; besides, the aluminum-silver multilayer broadband reflection film has good neutral performance even used at a large angle and also has good environmental adaptability.

Description

technical field [0001] The invention belongs to the technical field of thin film deposition, and in particular relates to an aluminum-silver multilayer broadband reflection film based on an aluminum oxide intermediate layer. Background technique [0002] The reflective film based on the metal reflective layer is a commonly used thin film in the field of optical thin films, and plays an important role in optical systems such as telescope systems, laser systems, and lighting systems. There are usually the following requirements for this type of reflective film: [0003] 1. Wide reflection band. It has good reflection efficiency in a wide spectral range, preferably covering ultraviolet, visible and infrared bands; [0004] 2. Better neutrality. The polarization effect is low, and good reflection efficiency can be achieved in a large angle range; [0005] 3. High reflectivity. For reflective optical systems, high reflectivity means better performance; [0006] 4. Good envi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B5/08B32B15/04B32B15/20B32B9/04
CPCG02B5/0875B32B9/04B32B15/043B32B15/20B32B2250/40B32B2255/06B32B2307/416B32B2311/08B32B2311/24
Inventor 王彤彤高劲松王笑夷李玉东
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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