Adjustment method of gas concentration quasi-static adjustment equipment based on mass spectrometry feedback

A technology for gas concentration and adjustment equipment, applied in measurement devices, instruments, scientific instruments, etc., can solve the problems of inability to accurately adjust the concentration of gas in the right position, no feedback mechanism, etc., to improve stability, improve sensitivity, The effect of expanding the concentration range

Active Publication Date: 2017-04-05
KUSN HEXIN MASS PECTRUM TECH +2
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Problems solved by technology

[0004] The purpose of the present invention is to provide a method for adjusting gas concentration quasi-static adjustment equipment based on mass spectrometry feedback, which mainly solves the technical problem that there is no feedback mechanism, and the gas concentration cannot be accurately adjusted to the proper position during the measurement process

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  • Adjustment method of gas concentration quasi-static adjustment equipment based on mass spectrometry feedback

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Embodiment Construction

[0036] In order to make the objectives, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention, but not to limit the present invention.

[0037] see figure 1 , The gas concentration quasi-static adjustment device based on mass spectrometry feedback provided by the embodiment of the present invention includes a gas distribution instrument, a mass spectrometer 15 communicated with the gas distribution instrument, and an embedded control system. The mass spectrometer 15 uses the embedded control system to perform mass spectrometry measurement on the gas in the gas distribution instrument.

[0038] The gas distribution instrument includes cylinder 18, piston 16, valve one 7, valve two 8, valve three 9, buffer pool one 4, buffer...

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Abstract

The present invention discloses a gas concentration quasi-static regulation device based on mass spectrum feedback and a regulation method. The device comprises a gas distribution apparatus, a mass spectrometer in communication with the gas distribution apparatus, and an embedded control system. The mass spectrometer uses the embedded control system to conduct mass spectrometry measurements on the gas within the gas distribution apparatus. The gas distribution apparatus includes a cylinder, a piston fitted in the cylinder, and a motor for driving displacement of the piston; and the piston and the bottom of the cylinder form a main cavity communicating with the mass spectrometer; the main cavity inputs test gas through a valve 1, and inputs a test gas through a valve 2. The embedded control system and electrical mechanical are in electrical connection; and according to the measurement results of the mass spectrometer, the motor adjusts the shift amount of the piston. The present invention also discloses a regulation method of the gas concentration quasi-static regulation device based on mass spectrum feedback.

Description

technical field [0001] The invention relates to a method for adjusting a quasi-static gas concentration adjusting device, in particular to a method for adjusting a gas concentration quasi-static adjusting device based on mass spectrometry feedback. Background technique [0002] The dynamic range of the concentration measurement of different substances in the gas is one of the important performances of the mass spectrometer. Due to the limitation of the dynamic range of mass spectrometry, it is difficult for most mass spectrometry instruments to take into account the measurement of ultra-trace substances, trace substances and trace substances at the same time. [0003] The common practice is to use a gas distribution instrument for trace and trace substances, one is the sample to be tested, the other is the mixed gas, and then mixed in the same ratio to bring the concentration of the gas into the measurable range. However, through the method of gas distribution instrument, t...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N30/72
Inventor 朱辉程平董俊国周振黄正旭高伟傅忠
Owner KUSN HEXIN MASS PECTRUM TECH
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