Displacement-adjustable precision locating platform

A precision positioning and adjustable technology, applied in the direction of machine/support, supporting machine, mechanical equipment, etc., can solve problems such as low assembly accuracy, difficult operation, and influence on the overall positioning accuracy of the platform, so as to solve mutual interference and improve accuracy Sexuality, the effect of simplifying the operation process

Active Publication Date: 2016-04-13
SOUTH CHINA UNIV OF TECH +1
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the traditional compliant precision positioning platform has low assembly accuracy, is not easy to operate, and la

Method used

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  • Displacement-adjustable precision locating platform
  • Displacement-adjustable precision locating platform
  • Displacement-adjustable precision locating platform

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Example Embodiment

[0023] The present invention will be further explained below in conjunction with the drawings and embodiments.

[0024] Such as Figure 1 to Figure 4 As shown, a displacement-adjustable precision positioning platform includes: a base 1 for support and protection, which is installed on a precision optical vibration isolation platform through threaded holes evenly distributed around it, and is also machined with other parts for mounting Several threaded holes; through the cross-rotating guide rail to achieve the X-axis Y-axis displacement and R-axis rotation in three degrees of freedom of the manual adjustable frame slide platform 2 finely adjusted, the manually adjustable frame slide platform 2 is evenly distributed through the bottom The four countersunk screws are fixed to the base 1, and a number of threaded holes are evenly distributed on the work surface; the platform pad 8 is installed on the platform working surface 14 of the adjustable frame displacement slide platform 2, ...

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Abstract

The invention discloses a displacement-adjustable precision locating platform. The displacement-adjustable precision locating platform comprises a base, a manual adjustable frame sliding table platform, a platform cushion block, a compliant hinge precision locating platform body, four electromagnetic armatures, two Z-axis right-angle junction plates and electromagnetic drivers. The manual adjustable frame sliding table platform can achieve three-freedom-degree precision locating adjustment through a cross rotating guide rail. The platform cushion block is arranged on a sliding table through four evenly-distributed threaded holes. The middle of the compliant hinge precision locating platform body is fixed to the platform cushion block through two threaded holes, and therefore the platform can achieve displacement in the X-axis direction and Y-axis direction along with the manual adjustable frame sliding table platform. The four electromagnetic armatures are fixed in the four directions of the compliant hinge precision locating platform body in a threaded connection manner. The two Z-axis right-angle junction plates are in threaded connection with the base of the platform. The electromagnetic drivers serve as drive equipment of the platform and are in threaded connection with the Z-axis right-angle junction plates to be connected with the base of the platform. The displacement-adjustable precision locating platform is simple in structure, small in overall size, low in cost and convenient to operate, and the high-precision locating requirement can be met.

Description

technical field [0001] The invention belongs to the field of flexible and precise positioning, in particular to a precision positioning platform with adjustable displacement. Background technique [0002] Precision positioning technology has a wide range of applications in biomedical engineering, precision optical engineering, microelectronic systems, national defense technology and other fields, and has become an indispensable part of high-tech development. Precision positioning technology uses a high-precision drive device to drive the support structure to achieve positioning requirements. Compared with other positioning technologies, the flexible hinge precision positioning platform obtains the displacement output of the platform through electromagnetic drive. It has a simple structure, can eliminate the friction between the hinges and the return gap, and does not need lubrication. The advantages. For fields such as semiconductor lithography, micro-assembly, and bio...

Claims

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Application Information

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IPC IPC(8): F16M11/04
CPCF16M11/043
Inventor 王念峰张志远张宪民郑永忠周升勇
Owner SOUTH CHINA UNIV OF TECH
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