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X, Y and theta plane three-freedom-degree precision positioning platform

A precision positioning and degree of freedom technology, applied in the direction of machine/support, supporting machine, mechanical equipment, etc., can solve the problems of assembly accuracy positioning, complex structure, and many assembly procedures, etc., to achieve simple and compact structure and large output displacement , large stroke and high bandwidth and high precision displacement output effect

Active Publication Date: 2016-12-07
GENERAL ENG RES INST CHINA ACAD OF ENG PHYSICS
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, these structures are generally more complicated, and there are many assembly procedures, which lead to the impact of assembly accuracy on positioning; in addition, the natural frequency of these precision positioning platforms is generally not high, and it is difficult to achieve precise movement of thousands of hertz

Method used

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  • X, Y and theta plane three-freedom-degree precision positioning platform
  • X, Y and theta plane three-freedom-degree precision positioning platform
  • X, Y and theta plane three-freedom-degree precision positioning platform

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Embodiment Construction

[0024] The present invention will be further described below in conjunction with accompanying drawing:

[0025] Such as figure 1 and figure 2 As shown, a XYθ plane three-degree-of-freedom precision positioning platform of the present invention includes a piezoelectric ceramic 1, a composite diamond displacement amplification mechanism 2, a bridge displacement amplification mechanism 3, a motion platform 4 and a fixed frame 5, and the piezoelectric ceramic 1 is installed on In the composite diamond-shaped displacement amplification mechanism 2, four composite diamond-shaped displacement amplification mechanisms 2 are arranged in parallel and are respectively located at the four corners of the fixed frame 5. The moving platform 4 is located at the center of the fixed frame 5. The displacement amplifying mechanism 3 is respectively connected with the compound rhombic displacement amplifying mechanism 2 located on both sides of the motion platform 4 .

[0026] The composite dia...

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Abstract

The invention discloses an X, Y and theta plane three-freedom-degree precision positioning platform. The X, Y and theta plane three-freedom-degree precision positioning platform comprises piezoelectric ceramic, composite rhombus displacement amplification mechanisms, bridge type displacement amplification mechanisms, a motion platform and a fixing frame. The piezoelectric ceramic is installed in the composite rhombus displacement amplification mechanisms, and the four composite rhombus displacement amplification mechanisms are arranged in parallel and located at the four corners of the fixing frame; and the motion platform is located at the center of the fixing frame, and the two side faces of the motion platform are connected with the composite rhombus displacement amplification mechanisms located on the two sides of the motion platform through the two bridge type displacement amplification mechanisms. Through the combination of the four composite rhombus displacement amplification mechanisms and the two bridge type displacement amplification mechanisms, the X, Y and theta plane three-freedom-degree precision positioning platform has two transverse motion freedom degrees and one rotation freedom degree; and through combination of two-stage displacement amplification and different drives, three-plane-freedom-degree motion is achieved, the structure of the platform is simple and compact, and the output displacement is large.

Description

technical field [0001] The invention relates to the field of precision drive and control, in particular to an XYθ plane three-degree-of-freedom precision positioning platform and a realization method. Background technique [0002] In recent years, with the development of precision machinery technology, especially the emergence of micro-nano technology, science and technology have officially entered the "submicron-nano" era. Electronics, optics, machinery, and aerospace fields such as scanning electron microscopes, optical instruments, and precision machining are in urgent need of high-precision, high-resolution, and high-speed positioning platforms; and the current demand for multi-degree-of-freedom precision positioning platforms is even more urgent. For example, the ultra-high resolution and high-precision rotation of astronomical telescopes require multi-degree-of-freedom positioning platforms; the processing and assembly of precision optical instruments require multi-deg...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F16M11/04F16M11/06F16M11/18
CPCF16M11/045F16M11/048F16M11/06F16M11/18
Inventor 凌明祥刘谦李思忠黎启胜郑星曹军义
Owner GENERAL ENG RES INST CHINA ACAD OF ENG PHYSICS
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