X, Y and theta plane three-freedom-degree precision positioning platform

Abstract

The invention discloses an X, Y and theta plane three-freedom-degree precision positioning platform. The X, Y and theta plane three-freedom-degree precision positioning platform comprises piezoelectric ceramic, composite rhombus displacement amplification mechanisms, bridge type displacement amplification mechanisms, a motion platform and a fixing frame. The piezoelectric ceramic is installed in the composite rhombus displacement amplification mechanisms, and the four composite rhombus displacement amplification mechanisms are arranged in parallel and located at the four corners of the fixing frame; and the motion platform is located at the center of the fixing frame, and the two side faces of the motion platform are connected with the composite rhombus displacement amplification mechanisms located on the two sides of the motion platform through the two bridge type displacement amplification mechanisms. Through the combination of the four composite rhombus displacement amplification mechanisms and the two bridge type displacement amplification mechanisms, the X, Y and theta plane three-freedom-degree precision positioning platform has two transverse motion freedom degrees and one rotation freedom degree; and through combination of two-stage displacement amplification and different drives, three-plane-freedom-degree motion is achieved, the structure of the platform is simple and compact, and the output displacement is large.

Description

technical field [0001] The invention relates to the field of precision drive and control, in particular to an XYθ plane three-degree-of-freedom precision positioning platform and a realization method. Background technique [0002] In recent years, with the development of precision machinery technology, especially the emergence of micro-nano technology, science and technology have officially entered the "submicron-nano" era. Electronics, optics, machinery, and aerospace fields such as scanning electron microscopes, optical instruments, and precision machining are in urgent need of high-precision, high-resolution, and high-speed positioning platforms; and the current demand for multi-degree-of-freedom precision positioning platforms is even more urgent. For example, the ultra-high resolution and high-precision rotation of astronomical telescopes require multi-degree-of-freedom positioning platforms; the processing and assembly of precision optical instruments require multi-deg...

AI Technical Summary

Problems solved by technology

However, these structures are generally more complicated, and there are many assembly procedures, which lead to the impact of assembly accuracy on positioning; in addition, the natural frequency of these precision positioning platforms is generally not high, and it is difficult to achieve precise movement of thousands of hertz

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