Wide-spectrum flexible infrared detector array and manufacturing method thereof
An infrared detector and wide-spectrum technology, applied in the direction of electric solid-state devices, semiconductor devices, climate sustainability, etc., can solve the problems of unable to adjust the shape and visible range, fixed structure, small detection spectral range, etc., to achieve rich details , Uniform thickness and simple operation
Active Publication Date: 2017-05-31
UNIV OF ELECTRONIC SCI & TECH OF CHINA
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Problems solved by technology
[0005] Based on the above technical problems, the present invention provides a wide-spectrum flexible infrared detector array, thereby solving the technical problems of the previous infrared detectors with fixed structure, inability to adjust the shape and visible range, and the detection spectral range is small
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[0053] Such as figure 1 As shown, a wide-spectrum flexible infrared detector array includes a flexible substrate layer, a supporting silicon wafer layer, and a sensitive film layer glued together from bottom to top; wherein, the upper and lower surfaces of the sensitive film layer are respectively covered with a layer of metal aluminum The film is used as the upper and lower electrodes, and the overlapping area of the upper and lower electrodes constitutes an effective sensitive unit; the sensitive film layer is composed of a flexible pyroelectric polymer; the flexible pyroelectric polymer is polyvinylidene fluoride-hexafluoropropylene ;
[0054] The specific manufacturing method of the wide-spectrum flexible infrared detector array of this embodiment is as follows:
[0055] 1. Mix PVDF (polyvinylidene fluoride) and PHFP (polyhexafluoropropylene) powder with a mass ratio of 85:15; dissolve the mixture in dimethylformamide (DMF) solution, and the mass ratio of solute to solven...
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The invention relates to a wide-spectrum flexible infrared detector array. The array comprises a flexible substrate layer, a supporting silicon wafer layer and a sensitive thin film layer which are sequentially arranged from bottom to top. The upper surface and the lower surface of the sensitive thin film layer are both provided with a metal thin film, the metal thin films serve as an upper electrode and a lower electrode respectively, and the overlapped area of the upper and lower electrodes forms an effective sensitive unit; the sensitive thin film layer is composed of flexible pyroelectric polymers. The invention further discloses a manufacturing method of the wide-spectrum flexible infrared detector array. The structure can be flexibly deformed, the deformation amount of the array can be adjusted according to requirements, and accordingly the visible range of the array is adjustable. Besides, the sensitive thin films have a wide spectrum response range, the detection spectrum range is large, and accordingly an infrared detector based on the array has the imaging effects that the quality is higher and details are enriched.
Description
technical field [0001] The invention relates to an infrared detector, which belongs to the technical field of micro-electromechanical technology. More specifically, the invention relates to a wide-spectrum flexible infrared detector array and a manufacturing method thereof. Background technique [0002] The infrared detector (Infrared Detector) is a device that converts the incident infrared radiation signal into an electrical signal output. Infrared radiation is electromagnetic waves with wavelengths between visible light and microwaves, which cannot be detected by the human eye. To detect the existence of this radiation and measure its strength, it must be transformed into other physical quantities that can be detected and measured. Generally speaking, any effect caused by infrared radiation irradiating an object can be used to measure the intensity of infrared radiation as long as the effect can be measured and is sensitive enough. Modern infrared detectors mainly use i...
Claims
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Login to View More IPC IPC(8): H01L27/144H01L31/18
CPCH01L27/1443H01L27/1446H01L31/18Y02P70/50
Inventor黎威志李航陈金华李方圆太惠玲于贺蒋亚东
OwnerUNIV OF ELECTRONIC SCI & TECH OF CHINA