Radiation detection substrate, manufacturing method thereof, and radiation detection device

A technology for detecting substrates and rays, applied in the display field, can solve problems such as poor performance of X-ray detection devices, and achieve good performance

Active Publication Date: 2018-12-18
BOE TECH GRP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] In order to solve the problem of poor performance of the X-ray detection device, an embodiment of the present invention provides a radiation detection substrate, a manufacturing method thereof, and a radiation detection device

Method used

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  • Radiation detection substrate, manufacturing method thereof, and radiation detection device
  • Radiation detection substrate, manufacturing method thereof, and radiation detection device
  • Radiation detection substrate, manufacturing method thereof, and radiation detection device

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Embodiment Construction

[0070] In order to make the purpose, technical solution and advantages of the present application clearer, the implementation manners of the present application will be further described in detail below in conjunction with the accompanying drawings.

[0071] figure 1 A structural schematic diagram of a radiation detection substrate provided for an embodiment of the present invention, as shown in figure 1 As shown, the radiation detection substrate may include: a base substrate 1, a photodiode is arranged on the base substrate 1, the photodiode includes two doped layers and an intrinsic layer 02, and the intrinsic layer 02 is located between the two doped layers Between, the arrangement direction of the two doped layers is parallel to the base substrate 1 .

[0072] Wherein, the two doped layers include a first doped layer 011 and a second doped layer 012, and the number of free electrons in the first doped layer 011 is smaller than the number of holes (that is, the first dope...

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Abstract

The application discloses a radiation detection substrate, a manufacturing method thereof, and a radiation detection device, which belong to the field of display technology. The radiation detection substrate includes: a base substrate, on which a photodiode is arranged, the photodiode includes two doped layers and an intrinsic layer, the intrinsic layer is located between the two doped layers, and the two doped layers The arrangement direction is parallel to the base substrate. The application solves the problem of poor performance of the X-ray detection device and improves the performance of the X-ray detection device, and the application is used for the X-ray detection device.

Description

technical field [0001] The present application relates to the field of display technology, in particular to a radiation detection substrate, a manufacturing method thereof, and a radiation detection device. Background technique [0002] X-ray (also known as Roentgen ray) detection device can detect the internal shape and structure of the parts to be tested. The X-ray detection device includes: an X-ray source, an indirect X-ray detection substrate and a display. When using an X-ray detection device, the parts to be inspected can be placed between the X-ray source and the X-ray detection substrate, the X-ray source can emit X-rays, and the X-rays enter the X-ray detection substrate after passing through the parts to be inspected. The indirect X-ray detection substrate can generate electrical signals according to incident X-rays, and input the generated electrical signals to a display, so that the display displays images. [0003] In the related art, the indirect X-ray detec...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L31/115H01L31/0352H01L31/18
CPCH01L31/035272H01L31/115H01L31/1804G01T1/2018H01L31/02019H01L31/02325H01L31/1055G01T1/24H01L27/14663H01L31/022408H01L27/14612H01L27/14689H01L31/03762H01L31/1864H01L27/14698
Inventor 赵磊
Owner BOE TECH GRP CO LTD
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