Laser preprocessing device and processing method used for optical element

Abstract

The invention discloses a laser preprocessing device and processing method used for an optical element. The laser preprocessing device comprises a laser light source used for emitting laser as well as a light-splitting chopping plate, a reflecting mirror, a light beam shaping system and an electric translation stage used for placing a to-be-processed optical element are sequentially arranged in the laser transmission direction, wherein laser emitted by the laser light source passes through the light-splitting chopping plate and then is transmitted to the light beam shaping system through the reflecting mirror; the light beam shaping system is used for performing light beam shaping on laser; laser spots which are in Gaussian distribution are shaped into square spots which are uniformly distributed flatly; and finally, the laser is irradiated to the surface of the optical element for performing laser preprocessing on the optical element. According to the laser preprocessing device disclosed by the invention, irradiation energy density of the whole preprocessing process is uniform through the uniform square laser pots which are flatly focused, and dimensions of the spots are easily regulated through a multiplying power switching structure, so that the purpose of regulating energy density of laser which reaches the surface of the optical element is achieved.

Description

technical field [0001] The invention belongs to the field of laser pretreatment of optical materials, and in particular relates to a device and method for laser pretreatment of optical elements. Background technique [0002] The construction of high-power solid-state laser devices requires a huge number and variety of optical components. Taking NIF as an example, the whole device contains 7460 large-aperture optical components (0.5-1.0m), making it not only the largest laser in the world, but also the largest optical system ever. Although there are many technical and scientific challenges in the development of optical components for high-power laser devices, one of the most critical challenges is to eliminate laser-induced damage as much as possible. [0003] Laser pretreatment technology refers to the use of pulsed laser with a certain wavelength to irradiate the optical components with full aperture in a specific process, so as to improve their anti-damage ability. In so...

AI Technical Summary

Problems solved by technology

At present, laser pretreatment is one of the effective means to effectively improve the laser damage resistance of optical components, but the circular laser spots usually used are mostly Gaussian distribution, which makes the following problems appear in the pretreatment process: Peak power may cause damage to the surface of optical components; Gaussian circular spot needs to be spliced, which greatly reduces the efficiency of pretreatment; changing the spot size by moving the lens and thus changing the laser energy density makes the operation more complicated, etc.

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