A system and method for calibrating the leak rate of vacuum leaks of different gas leaks

Abstract

The invention discloses a system for calibrating the leak rates of vacuum leak holes of different leak indication gases. The system comprises a helium mass spectrum leak detector, a standard container, an argon source, a vacuum leak hole to be calibrated, a leak indication gas source, a constant volume chamber, a vortex molecular pump and a turbine mechanical pump; the vortex molecular pump and the turbine mechanical pump are connected with the constant volume chamber and the standard container by pipelines in sequence; one end of the vacuum leak hole to be calibrated is connected with the leak indication gas source by a pipeline, the other end is connected between the standard container and the constant volume chamber, and the helium mass spectrum leak detector and the argon source are respectively connected to the connecting pipeline. Besides, the system can obtain a conversion relation between leak rates when different leak indication gas media are quickly measured using the helium mass spectrum leak detector, via the magnitude of the leak rate of the leak hole measured by a constant volume method and in combination with the leak rates, measured by the helium mass spectrum leak detector, of vacuum leak holes of different leak indication gas media. The system is reasonable in design, simple in structure and convenient to operate, and can be used for calibrating the leak rates of vacuum leak holes of different leak indication gases.

Description

technical field [0001] The invention relates to a system and a method for calibrating the leak rate of a vacuum leak, in particular to a system and a method for calibrating the leak rate of a vacuum leak for different leak-indicating gases. Background technique [0002] At present, the methods commonly used in leak calibration include constant volume method, constant pressure method, mass spectrometry comparison method and so on. The constant volume method is calibrated by measuring the rate of change of pressure with time in a closed container with a constant volume, and the calibration range is usually 10 -1 ~10 -6 Pa·m 3 / s, the constant pressure method is to measure the rate of change of the volume at a constant pressure to achieve calibration, and the calibration range is usually 10 -3 ~10 -8 Pa·m 3 / s; the mass spectrometry comparison method uses a leak detector or a quadrupole mass spectrometer (QMS) as a comparator to achieve calibration by measuring the dynamic...

AI Technical Summary

Problems solved by technology

In addition, due to the shortcomings of the constant volume method, such as long experimental period and large environmental influence factors, it has brought difficulties to the rapid development of related work such as calibration of leak holes and quantitative measurement of different gas permeation rates.

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