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Automatic program management device and method for ion implantation machine table

A technology for ion implantation and management devices, applied in the fields of electrical digital data processing, instruments, calculations, etc., can solve the problems of many program parameters, machine software, etc., and achieve the effect of saving manpower and avoiding losses

Inactive Publication Date: 2018-04-20
SHANGHAI HUALI MICROELECTRONICS CORP
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, in view of the large number of program parameters and the complexity of the machine software, it is difficult for engineers to check out 100% errors

Method used

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  • Automatic program management device and method for ion implantation machine table
  • Automatic program management device and method for ion implantation machine table
  • Automatic program management device and method for ion implantation machine table

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Embodiment Construction

[0043] It should be noted that, in the case of no conflict, the following technical solutions and technical features can be combined with each other.

[0044] The specific embodiment of the present invention will be further described below in conjunction with accompanying drawing:

[0045] Such as figure 1 As shown, an automatic program management device for ion implantation machines, the above-mentioned automatic program management device communicates with multiple ion implantation machines; the above-mentioned automatic program management device includes:

[0046] A receiving unit 1, the above-mentioned receiving unit 1 is used to provide a user with an input selection command to select a target machine from a plurality of the above-mentioned ion implantation machines;

[0047] A download unit 2, the download unit 2 is connected to the receiving unit 1, and is used to download the corresponding program file to be checked from the target machine after the receiving unit 1 se...

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Abstract

The invention provides an automatic program management device and method for an ion implantation machine table. The device comprises a receiving unit, a downloading unit, a parameter collection unit and a program correctness checking unit, wherein the receiving unit is used for providing an input selection command for a user; the downloading unit is used for downloading a corresponding to-be-checked program file after a target machine table is selected; the parameter collection unit is used for collecting to-be-checked parameters for each program in the to-be-checked program file according toa preset missile attack strategy and generating a to-be-checked parameter report, wherein the missile attack strategy is to traverse the to-be-checked file line by line according to a file format of the to-be-checked file to acquire the to-be-checked parameters; and the program correctness checking unit is used for performing correctness checking on the to-be-checked parameter report to obtain a checking result corresponding to the to-be-checked program file. The automatic program management device and method have the advantages that correctness checking can be automatically performed on the ion implantation programs of the VARIAN ion implantation machine table, manpower of manual checking is saved, furthermore it can be 100-percent guaranteed that program errors are checked out, and losscaused by the program errors is avoided.

Description

technical field [0001] The invention relates to the technical field of semiconductor device manufacturing, in particular to an automatic program management device and method for ion implantation programs. Background technique [0002] At present, in the chip manufacturing process, ion implantation is a very important process link, which is usually completed by using an ion implantation machine. However, this process cannot be monitored online by means of film thickness and critical dimensions like other processes. Once the ion implantation program is wrong, it will not be discovered until the electrical test, which will cause major losses. [0003] In response to the above problems, the common practice in the industry is: after the program is created, arrange engineers to recheck the program to correct program errors before using the program. However, in view of the large number of program parameters and the complexity of the machine software, it is difficult for engineers ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G06F11/36
CPCG06F11/3604
Inventor 高杏孙天佑
Owner SHANGHAI HUALI MICROELECTRONICS CORP
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