Magnetic recording medium, method for manufacturing magnetic recording medium and magnetic recording and reproducing apparatus
A technology of magnetic recording medium and magnetic layer, applied in the direction of magnetic recording, magnetic recording layer, base layer of recording layer, etc., can solve the problem of deteriorating the corrosion resistance of magnetic recording medium, etc.
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Embodiment 1
[0106] A magnetic recording medium was fabricated as follows.
[0107] The cleaned outer diameter of 2.5 inches glass non-magnetic substrate 1 (manufactured by HOYA company) is placed in the film formation chamber of DC magnetron (magnetron) sputtering device C-3040 (manufactured by ANELVA company), and the The film forming chamber is exhausted to an ultimate vacuum of 1×10 -5 After Pa, an adhesion layer with a thickness of 10 nm was formed on the non-magnetic substrate 1 using a Cr-50Ti {the content of Ti is 50 at %, and the remainder is Cr} target material.
[0108] Next, use a Co-20Fe-5Zr-5Ta {the content of Fe is 20at%, the content of Zr is 5at%, the content of Ta is 5at%, and the rest is Co} target material, and the temperature of the non-magnetic substrate 1 is 100 °C or lower, a soft magnetic layer with a thickness of 25 nm is formed on the adhesive layer. Then, using a Ru target, a Ru layer with a thickness of 0.7 nm was formed on the soft magnetic layer. Next, usin...
Embodiment 2
[0119] A magnetic recording medium 10 was obtained in the same manner as in Example 1, except that a Co10Cr20Pt14Ti target was used to form a magnetic layer having a granular structure composed of 93(Co12Cr22Pt7Ti)-7(TiC) when forming the second magnetic layer 4b.
Embodiment 3
[0121] In addition to using the Co10Cr20Pt14Al target to form the second magnetic layer 4b formed by 97 (Co12Cr22Pt2Al)-3 (Al 4 C 3 ) except for the magnetic layer having a granular structure composed of ), a magnetic recording medium 10 was obtained in the same manner as in Example 1.
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