Magnetic recording medium, manufacturing method of magnetic recording medium, and magnetic recording and reproducing apparatus
一种磁记录介质、磁性层的技术,应用在磁记录、磁记录层、记录层的基础层等方向,能够解决恶化磁记录介质耐腐蚀性等问题
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Embodiment 1
[0106] A magnetic recording medium was fabricated as follows.
[0107] The cleaned outer diameter of 2.5 inches glass non-magnetic substrate 1 (manufactured by HOYA company) is placed in the film formation chamber of DC magnetron (magnetron) sputtering device C-3040 (manufactured by ANELVA company), and the The film forming chamber is exhausted to an ultimate vacuum of 1×10 -5 After Pa, an adhesion layer with a thickness of 10 nm was formed on the non-magnetic substrate 1 using a Cr-50Ti {the content of Ti is 50 at %, and the remainder is Cr} target material.
[0108] Next, use a Co-20Fe-5Zr-5Ta {the content of Fe is 20at%, the content of Zr is 5at%, the content of Ta is 5at%, and the rest is Co} target material, and the temperature of the non-magnetic substrate 1 is 100 °C or lower, a soft magnetic layer with a thickness of 25 nm is formed on the adhesive layer. Then, using a Ru target, a Ru layer with a thickness of 0.7 nm was formed on the soft magnetic layer. Next, usin...
Embodiment 2
[0119] A magnetic recording medium 10 was obtained in the same manner as in Example 1, except that a Co10Cr20Pt14Ti target was used to form a magnetic layer having a granular structure composed of 93(Co12Cr22Pt7Ti)-7(TiC) when forming the second magnetic layer 4b.
Embodiment 3
[0121] In addition to using the Co10Cr20Pt14Al target to form the second magnetic layer 4b formed by 97 (Co12Cr22Pt2Al)-3 (Al 4 C 3 ) except for the magnetic layer having a granular structure composed of ), a magnetic recording medium 10 was obtained in the same manner as in Example 1.
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