Active switch, manufacture method thereof, and display device

A manufacturing method and switch technology, applied to electrical components, electrical solid devices, circuits, etc., can solve problems such as large leakage currents

Inactive Publication Date: 2019-04-12
HKC CORP LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Based on this, it is necessary to provide an active switch, a manufacturing method thereof, and a display device in view of the large leakage current of the switching device made of the BCE structure, which causes the IS phenomenon of the display device during the reliability test.

Method used

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  • Active switch, manufacture method thereof, and display device
  • Active switch, manufacture method thereof, and display device
  • Active switch, manufacture method thereof, and display device

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Embodiment Construction

[0043] In order to facilitate the understanding of the present application, the present application will be described more fully below with reference to the relevant drawings. Preferred embodiments of the application are shown in the accompanying drawings. However, the present application can be embodied in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the application more thorough and comprehensive.

[0044] It should be noted that when an element is referred to as being “fixed” to another element, it can be directly on the other element or there can also be an intervening element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and similar expressions are used herein for purposes of ill...

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Abstract

The invention relates to an active switch, a manufacture method thereof, and a display device. The manufacture method for the active switch comprises the following steps that: providing a substrate, and forming a first metal layer on the substrate, carrying out patterning processing on the first metal layer, and forming a grid electrode; forming a grid electrode insulation layer, an active layer,a doped layer and a source and drain electrode in sequence on the grid electrode; adopting a two-time wet method etching technology and a two-time dry method etching technology to form an active layer, a doped layer, a source and drain electrode and a channel region; under preset power, carrying out gas preprocessing on the channel region, wherein the power of the gas preprocessing device is regulated to preset power; and under the preset power, carrying out heating processing on the channel region in the mixed atmosphere of nitrogen and ammonia gas. By use of the manufacture method, the lightleakage current of an active switch device can be effectively lowered, and a ghost phenomenon is eliminated.

Description

technical field [0001] The present application relates to the field of display technology, in particular to an active switch, a manufacturing method thereof, and a display device. Background technique [0002] As a switching device that plays a very important role in the working performance of the display panel, it is a very important key device in the display technology. With the iterative development of display technology, display devices with higher performance, high image quality and large size have become a development trend, and are also factors that directly affect user viewing experience and shopping experience. In terms of high performance, if a display device is to have higher performance, one aspect requires high-performance switching devices in the display device. [0003] In the usual manufacturing process of amorphous silicon switching devices, BCE (Back Channel Etching, back channel etching) structure is adopted. The cost of this structure is relatively low a...

Claims

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Application Information

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IPC IPC(8): H01L27/12
CPCH01L27/1214H01L27/124H01L27/1259
Inventor 莫琼花
Owner HKC CORP LTD
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