High-precision Z-axis gyroscope

Abstract

The invention provides a high-precision Z-axis gyroscope including a driving mass block, a coupling structure, and Coriolis force mass blocks. A first direction, a second direction, and a third direction that are perpendicular to each other are limited. The driving mass block is configured to move in a first direction. The driving mass block and the Coriolis force mass blocks are connected based on elastic structures, so that the Coriolis force mass blocks are driven by the driving mass blocks to move in the first direction and move in the second direction under the Coriolis force effect in the second direction. The Coriolis force mass blocks are connected to the two sides of the coupling structure symmetrically, so that the Coriolis force mass blocks at the two sides move in the first direction in opposite moving directions at the same moving amplitudes. The coupling structure includes a plurality of elastic members extending in the first direction and / or the second direction.

Description

technical field [0001] The invention relates to the field of MEMS, in particular to a high-precision Z-axis gyroscope. Background technique [0002] Micro-gyroscopes based on micro-electro-mechanical systems (MEMS, Micro-Electro-Mechanical-System) have been widely used in consumer electronics, industry, medical, military It has been used more and more in a very wide range of fields. At present, in the application of various mobile terminals, cameras, game controllers, navigators and other products, to a certain extent, it has become a standard configuration. With the gradual trend of portable and lightweight consumer electronics products, the market demand for gyroscope chips is increasingly urgent. The Z-axis single-axis gyroscope is widely used in the plane. Taking floor sweepers, intelligent robots, and industrial automation as examples, the Z-axis single-axis gyroscope requires high precision and small zero point deviation to be suitable for long-term High precision ap...

AI Technical Summary

Problems solved by technology

[0004] The existing technology generally uses inclined spring beams for coupling, which is prone to process deviations, resulting in incomplete symmetry of the movement of the Coriolis force mass; the driving mass is only fixed by a fixed anchor point through the spring beam on one side, and the center of gravity of the mass is in the plane The direction is asymmetrical. Due to its own gravity, in the case of process deviation or external stress changes, the driving mode is prone to in-plane or out-of-plane disturbances, so that the driving direction of motion is deviated; Under the action of gravity of the mass block, there will be out-of-plane displacement, resulting in the deviation of gyroscope zero point and sensitivity, and it is easily affected by process deviation and external factors

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