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A compound cleaning device and method for masks

A mask and cleaning tank technology, applied in the field of composite cleaning devices, can solve the problems of a large amount of equipment installation space, increase the cost of setting up multiple cleaning tanks, etc., and achieve the effects of reducing purchase cost, improving reverse pollution, and improving cleaning effect.

Active Publication Date: 2022-04-19
LTD DEVICEENG C
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0019] However, this method requires a large amount of equipment installation space, increases the installation cost of multiple cleaning tanks, purchases a large amount of cleaning liquid, and takes a long time to clean the mask

Method used

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  • A compound cleaning device and method for masks
  • A compound cleaning device and method for masks
  • A compound cleaning device and method for masks

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Embodiment Construction

[0051] Hereinafter, a compound cleaning device and method for a mask will be described in detail according to the present invention with reference to the accompanying drawings.

[0052] Before the present invention is further specifically described, it should be understood that the terms or words used in the present invention and claims are not limited to the general or dictionary meanings, but in order to best explain the present invention, when the terms can be properly defined On the basis of the principle of the concept, it is interpreted as having the meaning and concept consistent with the technical concept of the present invention.

[0053] Therefore, the specific embodiments in the present invention and the configurations described in the drawings should not be construed as a representative of the entire technical concept of the present invention, but provided as preferred examples of the present invention. Obviously, many equivalents and variables in the embodiments o...

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Abstract

The present invention is a compound cleaning device and method for a mask, wherein the compound cleaning device for a mask comprises: a cleaning tank, which stores cleaning liquid for cleaning the mask; an outer storage tank, which The outer storage tank is installed on the outer periphery of the cleaning tank to temporarily store the cleaning liquid overflowing from the cleaning tank; the spray nozzle unit is installed on the top of the cleaning tank to spray the cleaning liquid to the cleaning tank lifted from the inside of the cleaning tank. on the cover; and a circulation supply device, which makes the sprayed cleaning liquid flow back into the cleaning tank. Complete removal of foreign matter is achieved, foreign matter is prevented from adhering to the mask lifted from the inside of the cleaning tank, thereby preventing the risk of embossing defects caused by the mask with foreign matter, and greatly improving the cleaning effect.

Description

technical field [0001] The present invention relates to a compound cleaning device and method for masks, in particular, a compound cleaning device and method for masks, which can not only prevent foreign matter (such as particles) on the mask surface and greatly reduce the consumption of cleaning fluid. Background technique [0002] With the rapid development of the complex information industry, ultra-high-speed information transmission enables the exchange of information including text, sound, images, etc., not limited to space and time. [0003] The information transmission medium has evolved from CRT to large FPD (flat panel display) such as LCD, PDP, LED, UHD, OLED, etc., and suitable for ergonomic design and multifunctional design, such as PDA, Web, PAD, etc., for Small displays for ultra-high-speed mobile terminals. The sudden rise in demand for monitors due to convenience is the reason for the continued development of the monitor market. [0004] Due to the high qu...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B08B3/02B08B3/12B08B3/08B08B13/00
CPCB08B3/022B08B3/12B08B3/08B08B13/00B08B2203/0217B08B2203/007B08B2203/0264G03F7/70925H01L21/6704H01L21/02052H10K71/00
Inventor 尹沧老
Owner LTD DEVICEENG C