Cleaning device of chemical mechanical polishing equipment

Abstract

The invention discloses a cleaning device of chemical mechanical polishing equipment. The cleaning device comprises a bottom plate and a supporting plate; universal wheels are mounted at the lower endof the bottom plate; supporting columns and an air blower are fixed to the upper end of the bottom plate; the upper ends of the supporting columns are fixed to a sewage tank; a water storage tank isarranged at the upper end of the sewage tank; the upper end surface of the supporting plate is arranged obliquely; side plates are symmetrically fixed to the upper end of the supporting plate; one endof each side plate is fixed to a coaming; a water outlet and an air blowing opening are formed in the coaming; the water outlet is connected with the sewage tank through a water outlet pipe; the airblowing opening is connected with the air blower through an air inlet pipe; threaded holes are symmetrically formed in the upper side of the coaming; screws are arranged in the threaded holes; limiting blocks are fixed to the upper ends of the screws; the screws penetrate through a moving plate and are connected with the moving plate through threads; a water storage pipe is fixed to the upper endof the moving plate; one or more water outlet spraying heads are mounted on the water storage pipe; the water storage tank is connected with a water pump; and the water pump is connected with the water storage pipe through a water inlet pipe I. By the aid of the cleaning device, a polishing wheel can be cleaned conveniently, and the labor intensity of a worker can be reduced.

Description

technical field [0001] The invention relates to a mechanical cleaning device, in particular to a cleaning device for chemical mechanical polishing equipment. Background technique [0002] Polishing machines, also known as grinders, are often used for mechanical grinding, polishing and waxing. Its working principle is: the motor drives the sponge or wool polishing wheel installed on the polishing machine to rotate at a high speed. Due to the joint action of the polishing wheel and the polishing agent and friction with the surface to be polished, the paint surface pollution, oxide layer, and shallow marks can be removed. Purpose. The speed of the polishing wheel is generally 1500-3000 r / min, mostly stepless speed change, which can be adjusted at any time during construction. The polishing wheel is generally equipped with a protective shell, and debris and oil stains generated during the polishing process will remain in the protective shell. When the polishing machine needs t...

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