A pressure and underwater acoustic integrated sensor and its preparation method
An integrated sensor and underwater acoustic technology, applied in the field of sensors, can solve the problems of not being able to reflect the change of water pressure at the end of the underwater acoustic sensor synchronously, unable to provide pressure signals for calibration of the underwater acoustic sensor, and poor measurement accuracy at the end of the underwater acoustic sensor. Effects of pressure measurement error and loss of underwater acoustic sensitivity, reduction of background noise, and improvement of accuracy
Active Publication Date: 2020-09-29
南京元感微电子有限公司
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Problems solved by technology
Due to the underwater environment, especially in the ocean, the water flow fluctuates greatly in complex environments such as ocean currents and sea winds, and there are many low-frequency noise signals, and the detection range of the underwater acoustic sensor belongs to the low-frequency detection frequency range, so there will be relatively large noise at the end of the underwater acoustic sensor. Large background noise reduces the measurement accuracy of the underwater acoustic sensor. At this time, it is necessary to use a pressure sensor to test the pressure signal to provide water pressure information for the calibration of the underwater acoustic sensor.
At present, the pressure sensor and the underwater acoustic sensor used in the underwater detection system are packaged separately, and then installed into the detection system separately. There is a certain distance between the pressure sensor and the probe of the underwater acoustic sensor, which cannot reflect the change of water pressure at the end of the underwater acoustic sensor synchronously. Provide accurate pressure signals for hydroacoustic sensor calibration, making the measurement accuracy at the hydroacoustic sensor end poor
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[0048] In order to enable those skilled in the art to better understand the technical solution of the present disclosure, the present disclosure will be described in further detail below in conjunction with the accompanying drawings and specific embodiments. Apparently, the described embodiments are some of the embodiments of the present disclosure, not all of them. Based on the described embodiments of the present disclosure, all other embodiments obtained by persons of ordinary skill in the art without creative effort fall within the protection scope of the present disclosure.
[0049] Such as figure 1 As shown, this embodiment provides an integrated pressure and underwater acoustic sensor 100 , including: a substrate 110 , a top cover 120 , a pressure sensing unit 130 and an underwater acoustic sensing unit 140 .
[0050] The substrate 110 includes a first surface 111 and a second surface 112 oppositely arranged along its thickness direction. Exemplarily, the substrate 110...
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The disclosure provides a pressure and underwater acoustic integrated sensor and a preparation method thereof. The integrated sensor includes: a substrate, the substrate includes a first surface and a second surface oppositely arranged along its thickness direction, and a first back cavity is arranged on the first surface and a second back cavity; a top cover, the top cover is arranged on the second surface, the top cover is provided with a first metallized via hole and a second metallized via hole through its thickness, and the top cover faces one side of the substrate A first cavity and a second cavity are also provided, and the first cavity and the second cavity correspond to the first back cavity and the second back cavity respectively; the pressure sensing unit and the hydroacoustic unit are formed on the substrate by a synchronous patterning process. As for the sensing unit, the pressure sensing unit is connected to the first metallized via hole, and the underwater acoustic sensing unit is connected to the second metallized via hole. The integrated sensor of the present disclosure integrates the pressure sensor and the underwater acoustic sensor, the distance between the pressure sensor and the probe of the underwater acoustic sensor is small, the background noise of the underwater acoustic sensor is reduced, and the accuracy of underwater acoustic measurement is improved.
Description
technical field [0001] The disclosure belongs to the technical field of sensors, and in particular relates to a pressure and underwater acoustic integrated sensor and a preparation method thereof. Background technique [0002] The ocean area of the earth accounts for 71% of the total area of the earth, but human exploration of the ocean is still in its infancy. Deep sea exploration technology is the basis for ocean development, ocean protection and sustainable development. The deep-sea environmental multi-physical quantity detection technology based on micro-system technology can use big data technology to analyze the deep-sea environmental multi-physical quantity data and the deep-sea environmental physical characteristics. While obtaining the deep-sea environmental multi-physical quantity data, it can complete the environmental physical quantity distribution analysis and form a deep-sea environment. The sound velocity distribution map, geomagnetic anomaly distribution...
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IPC IPC(8): G01H3/00G01H11/06G01L9/04
CPCG01H3/00G01H11/06G01L9/04
Inventor史晓晶柳俊文
Owner南京元感微电子有限公司