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A deterministic compensation method for the shape error of the guideway of the aspheric optical element processing machine tool

A technology for optical components and processing machine tools, which is applied in the direction of optical surface grinders, grinding machine parts, optical devices, etc., can solve the problems of ultra-precision grinding machine guide rail shape errors, high-precision control of component shape errors, etc., and achieve improvement Forming precision, effect of eliminating influence

Active Publication Date: 2022-02-11
LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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Problems solved by technology

In view of the demand for high-precision control of component shape errors in the ultra-precision forming process of large-aperture aspheric optical components, there is no public method for controlling the shape errors of the guide rails of ultra-precision grinding machines

Method used

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  • A deterministic compensation method for the shape error of the guideway of the aspheric optical element processing machine tool
  • A deterministic compensation method for the shape error of the guideway of the aspheric optical element processing machine tool
  • A deterministic compensation method for the shape error of the guideway of the aspheric optical element processing machine tool

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Embodiment Construction

[0047] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0048] The embodiment of the invention discloses a deterministic compensation method for the shape error of the guide rail of the aspheric optical element processing machine tool, such as figure 1 As shown, this embodiment specifically includes the following content:

[0049] 1. Simulation analysis of force deformation of machine tool guide rail 1

[0050] Using finite element analysis software, according to the three-dimensional structural model of the machi...

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Abstract

The invention discloses a deterministic compensation method for the shape error of the guide rail of a machine tool for processing aspheric optical elements, comprising the following steps: simulating and analyzing the force deformation of the guide rail of the machine tool; actually measuring the shape error of the guide rail; calculating the distribution of the shape error of the guide rail under processing conditions; , to obtain the coordinates of each point on the surface of the aspheric optical element, combined with the aspherical parallel grinding wheel motion control point coordinate transfer function model, to obtain the coordinates of the grinding wheel motion control lattice during the grinding process; superimposing the shape error of the guide rail to obtain the grinding wheel motion with error correction Control the lattice coordinates; perform grinding according to the processing trajectory formed by the corrected grinding wheel movement control point coordinates, and realize the deterministic control of the shape error of the guide rail. The invention can realize the deterministic compensation control of the shape error of the guide rail of the machine tool during the aspheric forming process, eliminate the influence of the deformation of the guide rail caused by the shape error of the guide rail and the grinding force on the final processing accuracy of the element, and improve the forming accuracy of the element.

Description

technical field [0001] The invention relates to the technical field of ultra-precision machining of aspheric optical elements, in particular to a deterministic compensation method for shape errors of guide rails of aspheric optical elements processing machine tools. Background technique [0002] Aspherical optical elements can eliminate the adverse effects of spherical aberration, coma, and aberration produced by spherical elements in the process of beam transmission, reduce light energy loss when the beam is focused, and improve focusing and calibration accuracy. It is obtained in modern large-scale optical systems a wide range of applications. The sagittal height and radius of curvature of each point on the aspheric surface are different. The precision grinding method is used to realize the precise forming of aspheric optical elements. It has the advantages of fast material removal rate and easy automation. It has been adopted by many large-scale The optical system is use...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B24B13/00B24B49/12B24B51/00G01B11/24G05B19/404
CPCB24B13/0018B24B13/0031B24B49/12B24B51/00G01B11/24G05B19/404
Inventor 周炼郑楠樊非李洁韦前才陈贤华张清华王健许乔
Owner LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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