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Deterministic compensation method for guide rail shape errors of aspheric optical element processing machine tool

A technology for optical components and machine tools, which is applied to optical surface grinders, grinding machine parts, and optical devices, etc., and can solve problems such as high-precision control of component shape errors, and ultra-precision grinding machine guide rail shape errors.

Active Publication Date: 2021-08-20
LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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AI Technical Summary

Problems solved by technology

In view of the demand for high-precision control of component shape errors in the ultra-precision forming process of large-aperture aspheric optical components, there is no public method for controlling the shape errors of the guide rails of ultra-precision grinding machines

Method used

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  • Deterministic compensation method for guide rail shape errors of aspheric optical element processing machine tool
  • Deterministic compensation method for guide rail shape errors of aspheric optical element processing machine tool
  • Deterministic compensation method for guide rail shape errors of aspheric optical element processing machine tool

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Embodiment Construction

[0047] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0048] The embodiment of the invention discloses a deterministic compensation method for the shape error of the guide rail of the aspheric optical element processing machine tool, such as figure 1 As shown, this embodiment specifically includes the following content:

[0049] 1. Simulation analysis of force deformation of machine tool guide rail 1

[0050] Using finite element analysis software, according to the three-dimensional structural model of the machi...

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Abstract

The invention discloses a deterministic compensation method for guide rail shape errors of an aspheric optical element processing machine tool. The method comprises the following steps that simulation analysis is carried out on guide rail stress deformation of the machine tool; the guide rail shape errors are actually measured; guide rail shape error distribution is calculated under the machining working condition; coordinates of all points on the surface of an aspheric optical element are obtained according to the aspheric equation, and grinding wheel motion control dot matrix coordinates in the grinding process are obtained in combination with an aspheric parallel grinding wheel motion control point coordinate transfer function model; the guide rail shape errors are overlaid, and grinding wheel motion control dot matrix coordinates with error correction are obtained; and grinding is carried out according to a machining track formed by the corrected grinding wheel motion control point coordinates to realize deterministic control over the guide rail shape errors. According to the method, deterministic compensation control over the machine tool guide rail shape errors in the aspheric surface forming machining process can be achieved, the influence of the guide rail shape errors and guide rail deformation caused by grinding force on the final element machining precision is eliminated, and the element forming machining precision is improved.

Description

technical field [0001] The invention relates to the technical field of ultra-precision machining of aspheric optical elements, in particular to a deterministic compensation method for shape errors of guide rails of aspheric optical elements processing machine tools. Background technique [0002] Aspherical optical elements can eliminate the adverse effects of spherical aberration, coma, and aberration produced by spherical elements in the process of beam transmission, reduce light energy loss when the beam is focused, and improve focusing and calibration accuracy. It is obtained in modern large-scale optical systems a wide range of applications. The sagittal height and radius of curvature of each point on the aspheric surface are different. The precision grinding method is used to realize the precise forming of aspheric optical elements. It has the advantages of fast material removal rate and easy automation. It has been adopted by many large-scale The optical system is use...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24B13/00B24B49/12B24B51/00G01B11/24G05B19/404
CPCB24B13/0018B24B13/0031B24B49/12B24B51/00G01B11/24G05B19/404
Inventor 周炼郑楠樊非李洁韦前才陈贤华张清华王健许乔
Owner LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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