Thin sheet-like article displacement detection method and displacement correction method

Abstract

During the taking-out or storing of thin sheet-like articles, the deviation of a thin sheet-like article from its proper position is detected and the correcting operation therefor is efficiently performed. A detection means (18) is installed on a support arm (14). The detection means (18) is ko-shaped (ko represents a Japanese kana character pronounced as / ko / ), with its open end being on the end effecter (11) side, the detection means being constructed to have a substantial depth to allow the thin sheet-like article (2) to pass without interference.

Description

Technical field [0001] The present invention relates to a transport robot for handling thin plate objects that require high positional accuracy when placed for conveyance and processing. In particular, the present invention relates to a method for placing the following thin plate objects in a box and various processing A transport device that moves between devices. The thin plate-like object refers to a thin plate such as a semiconductor wafer, a substrate for a liquid crystal display panel, a plasma display substrate, an organic electroluminescence substrate, an inorganic electroluminescence substrate, a printed circuit wiring substrate, etc. Matter. Background technique [0002] Generally, the production of thin plate-like objects such as substrates for semiconductors and liquid crystals is performed in a highly clean environment, a so-called clean room. The transport of the thin plate in the clean room is carried out for each box by receiving the thin plate on a bracket in th...

AI Technical Summary

Problems solved by technology

In this transport robot, since it is necessary to separately install a power source such as a motor of the rotation detection mechanism 14, there is a problem that it costs a separate cost, the mechanism is complicated, and motion control is also difficult.

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