Substrate processing apparatus
a processing apparatus and substrate technology, applied in the direction of packaging bottles, loading/unloading, packaging, etc., can solve the problems of inability to execute the transportation from the storage shelf to the opener almost simultaneously, and achieve the effect of improving throughput, reducing the time required for the cassette transfer operation, and efficient transportation
Inactive Publication Date: 2006-08-17
DAINIPPON SCREEN MTG CO LTD
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Benefits of technology
[0009] The transportation between the first mounting section and the plurality of shelves which is executed by the first transporting section, and the transportation between the second mounting section and the plurality of shelves which is executed by the second transporting section can be executed in parallel with each other. This can improve the throughput in the cassette storing and transporting unit, and in the substrate processing apparatus as well.
[0015] The time required for a cassette transfer operation can be reduced thereby to improve the throughput in the cassette storing and transporting unit, and in the substrate processing apparatus as well.
[0016] Accordingly, an object of the present invention is to provide a substrate processing apparatus that can transport efficiently a cassette in a cassette storing and transporting unit.
Problems solved by technology
Hence, the transportation from the storage shelf to the opener, and the transportation from the opener to the storage shelf cannot be executed almost simultaneously.
Method used
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[0028] Preferred embodiments of the present invention will be described below in detail with reference to the accompanying drawings.
1. First Preferred Embodiment
[0029]FIG. 1 is a perspective view showing the overall construction of a substrate processing apparatus 1 in a first preferred embodiment. The substrate processing apparatus 1 is an apparatus that takes out, from an FOUP (front opening unified pod) 80, a set of a plurality of substrates (lots) encased in the FOUP 80, and that performs substrate processings in sequence with respect to the plurality of substrates, for example, etching with chemical solution such as hydrofluoric acid, and rinse with de-ionized water. As shown in FIG. 1, the substrate processing apparatus 1 consists mainly of a load port 10, a loader and unloader section 100, and a substrate processing unit 200. FIG. 1 and the succeeding respective figures are accompanied by an XYZ rectangular coordinate system, where the Z-axis direction is the vertical direc...
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One transport robot transports an FOUP among a load port, a third mounting section, and a shelf array. The other transport robot, which is disposed on the reverse side of the one transport robot with the shelf array interposed between the two, transports an FOUP between the shelf array and a second mounting section. Executed in the third mounting section are mapping processing and transportation of a substrate encased in an FOUP to a substrate processing unit. This enables a plurality of transportations to be executed at almost the same time. Additionally, the two transport robots can execute transportation of an FOUP without mutual spatial interference.
Description
BACKGROUND OF THE INVENTION [0001] 1. Field of the Invention [0002] The present invention relates to a substrate processing apparatus that performs processing of a semiconductor substrate, a glass substrate for a liquid crystal display, a glass substrate for a photomask, a substrate for an optical disk, and the like (which are hereinafter referred to as a “substrate”). In particular, the invention relates to an improvement to transport efficiently a cassette in a cassette storing and transporting unit. [0003] 2. Description of the Background Art [0004] Conventionally, there has been known a substrate processing apparatus having a cassette storing and transporting unit that stores a cassette encasing a substrate, and transports a cassette to transfer a substrate between substrate processing units. The traditionally known substrate processing apparatus has such an advantage that the depth of a loader 10 can be reduced thereby to decrease its footprint. [0005] However, in the tradition...
Claims
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CPCH01L21/67769H01L21/67772
Inventor MITSUYOSHI, ICHIRO
Owner DAINIPPON SCREEN MTG CO LTD