High resolution low dose transmission electron microscopy real-time imaging and manipulation of nano-scale objects in the electron beam
a transmission electron microscopy and real-time imaging technology, applied in the field of apparatus and methods for manipulating, visualization and fabrication of nanoscopic structure, can solve the problem that the instruments used to conduct this type of manipulation do not allow real-time observation of manipulation
Inactive Publication Date: 2008-03-13
BOARD OF RGT THE UNIV OF TEXAS SYST
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Benefits of technology
The present invention provides a system and method for molecular manipulation using a low-dose, non-destructive electron beam that targets one or more target molecules for manipulation. The electron beam can be controlled to manipulate the target molecules in real-time, allowing for the fabrication of new products and the simultaneous observation and control of the fabrication process. The system can be automated and used in high-throughput applications. The invention also provides a way to identify and manipulate target molecules using the electron beam, which can be done in real-time and with high accuracy. The electron beam can be generated using a transmission electron microscope operating in bright field mode or darkfield mode. The molecular manipulation can be used for research, development, and production of a wide range of products, including polymers, glass, silicon, semiconductor materials, dopants, organic materials, electrically conductive materials, and electrically insulating materials.
Problems solved by technology
Other possible instruments to conduct this type of manipulation do not allow for real-time observation of the manipulation, in particular at low electron levels, due to the need to have a detector that is capable of detecting in real-time, e.g., a YAG crystal laser optically coupled with a silicon intensified target diode video camera.
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[0032]While the making and using of various embodiments of the present invention are discussed in detail below, it should be appreciated that the present invention provides many applicable inventive concepts that may be embodied in a wide variety of specific contexts. The specific embodiments discussed herein are merely illustrative of specific ways to make and use the invention and are not to delimit the scope of the invention.
[0033]As used herein, the term “electron beam” is used to describe any manipulatable electron beam, e.g., an electron beam in an electron microscope whether or not in a vacuum. Beam diameter ranges of between 4 and 500 nm will generally be used. Examples of electron beams that may be used with the present invention include those generated by transmission, scanning or other electron microscopes with or without the ability to visualize the image in real time. Depending on the level of resolution for the molecular manipulation, a very high resolution -condition ...
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Abstract
Description
CROSS REFERENCE TO RELATED APPLICATIONS[0001]This patent claims priority to U.S. Provisional Patent Application Ser. No. 60 / 553,483 filed Mar. 16, 2004, the entire contents of which are incorporated herein by reference.BACKGROUND OF THE INVENTION[0002]The United States Government may own certain rights in this invention under Department of Energy Grant No. DE-FG03-94ER20145. Without limiting the scope of the invention, its background is described in connection with micro and nanomanipulation, as an example.TECHNICAL FIELD OF THE INVENTION[0003]The invention relates to an apparatus and methods for the manipulation, visualization and fabrication of nanoscopic structure. [0004]Heretofore, in this field, the manipulation, visualization and fabrication of useful nanoscale devices has proved difficult. The capability to observe and manipulate material simultaneously at the nanoscale level is predicted to be invaluable in the design of nano-fabrication devices. Experimental manipulation an...
Claims
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IPC IPC(8): H01J37/30
CPCB82B3/00B82Y40/00B82Y30/00
InventorBROWN, R. MALCOLMBARNES, ZACKSAWATARI, CHIEKONDO, TETSUO
OwnerBOARD OF RGT THE UNIV OF TEXAS SYST