Solid state imaging device, manufacturing method of the same, and electronic equipment

a manufacturing method and imaging device technology, applied in the direction of semiconductor devices, radio frequency controlled devices, electrical equipment, etc., can solve the problems of color mixing and color shading (color unevenness), and achieve the effect of suppressing color mixing in pixels and suppressing color mixing and sensitivity reduction in pixels

Active Publication Date: 2019-07-11
SONY CORP
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  • Abstract
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AI Technical Summary

Benefits of technology

[0022]According to the present disclosure, it is possible to detect a phase difference. According to the present disclosure, it is possible to suppress the color mixing and the sensitivity reduction in the pixels for phase difference detection. Further, according to the present disclosure, it is possible to suppress the color mixing in pixels which are adjacent to the pixels for phase difference detection.
[0023]Note that, the present disclosure is not necessarily limited to the effects described here, and any of the effects described in the present disclosure may be acceptable.

Problems solved by technology

However, there is a case in which, when the arrangement interval between the color filters is narrow, color mixing and color shading (color unevenness) occur due to process variation caused by shifts that occur during the matching of the lithography process of the color filters.

Method used

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  • Solid state imaging device, manufacturing method of the same, and electronic equipment
  • Solid state imaging device, manufacturing method of the same, and electronic equipment
  • Solid state imaging device, manufacturing method of the same, and electronic equipment

Examples

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Embodiment Construction

First Illustrative Embodiment

[0085](Configuration Example of an Illustrative Embodiment of Solid State Imaging Device)

[0086]FIG. 1 is a block diagram showing an illustrative configuration example of an embodiment of a solid state imaging device to which the present technology is applied.

[0087]A solid state imaging device 41 of FIG. 1 is configured to include, on a semiconductor substrate which is not shown, a timing control unit 42, a vertical scanning circuit 43, a pixel array unit 44, a constant current source circuit unit 45, a reference signal generation unit 46, a column AD conversion unit 47, a horizontal scanning circuit 48, a horizontal output line 49, and an output circuit 50.

[0088]The timing control unit 42 supplies a clock signal or a timing signal, which is necessary for predetermined operations, to the vertical scanning circuit 43 and the horizontal scanning circuit 48 on the basis of a master clock of a predetermined frequency. For example, the timing control unit 42 s...

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PUM

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Abstract

A solid state imaging device that includes a phase difference detection pixel which is a pixel for phase difference detection; a first imaging pixel which is a pixel for imaging and is adjacent to the phase difference detection pixel; and a second imaging pixel which is a pixel for imaging other than the first imaging pixel. An area of a color filter of the first imaging pixel is smaller than an area of a color filter of the second imaging pixel.

Description

TECHNICAL FIELD[0001]The present disclosure relates to a solid state imaging device, a manufacturing method of the same, and electronic equipment. In particular, the present disclosure relates to a solid state imaging device, a manufacturing method of the same, and electronic equipment which enable the suppression of color mixing and the suppression of sensitivity reduction in pixels for phase difference detection.CROSS REFERENCE TO RELATED APPLICATIONS[0002]This application claims the benefit of Japanese Priority Patent Application JP 2013-257294 filed Dec. 12, 2013, and Japanese Priority Patent Application JP 2014-109412 filed May 27, 2014, the entire contents of each of which are incorporated herein by reference.BACKGROUND ART[0003]In recent years, there has been wide adoption of imaging apparatuses such as digital still cameras and digital video cameras which image an object such as a person or an animal using a solid state imaging device, which is a Complementary Metal-Oxide Se...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): H01L27/146
CPCH01L27/14621H01L27/14623H01L27/14685H01L27/14634H01L27/14656H01L27/14605H01L27/14627
Inventor TAYANAKA, HIROSHIINOUE, YUUJINAKATA, MASASHI
Owner SONY CORP
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