The utility model discloses a kind of
silicon wafer silicon groove depth measuring devices, including base, support platform, dial gauge, support,
locking mechanism and probe, support platform is horizontally arranged above base, the lower end of support is fixedly connected with base, support upper end extends to above support platform, the main body of dial gauge is vertically locked in support upper end by
locking mechanism, probe includes inner sleeve, outer sleeve, locking piece, claw and probe, inner sleeve coaxially covers in dial gauge lower end, multiple grooves are sequentially arranged in the circumference of inner sleeve, claw is slidably connected in groove, claw inner end clamps dial gauge lower end, claw outer end protrudes from inner sleeve, and be provided with inclined surface, outer sleeve is rotatably connected in inner sleeve outer, and extrude above inclined surface, locking piece locks outer sleeve on inner sleeve, probe is vertically fixedly connected in inner sleeve lower end, the outer
diameter of probe lower end is greater than 50 microns and less than 500 microns.The utility model proposes a kind of
silicon wafer silicon groove depth measuring devices, the groove depth of narrow small silicon groove can be measured.