Control method of pulse direction of pulse power supply

Abstract

The invention relates to a control method of pulse direction of a pulse power supply, mainly comprising the following steps: A. acquiring a sampling value of a peak value to obtain an OUT peak value (t) as peak value controlled quantity; B. acquiring a sampling value of a base value and calculating an OUT peak-base (t) as controlled quantity of a different value between the peak value and the base value; C. if the OUT peak-base (t) is not less than 0, executing step D, and if the OUT peak-base (t) is less than 0, executing step E; D. subtracting the OUT peak-base (t) from the OUT peak value (t) to obtain a result which is taken as an OUT base value (t) for base value controlled quantity at t time, and then executing step F; E. taking the OUT peak value (t) as the OUT base value (t), and then executing step F; and F. converting and then outputting the OUT peak value (t) and the OUT base value (t). The control method of the pulse direction of the pulse power supply adopts a closed-loop control mode so that the output peak value is always no less than the base value, thus ensuring pulse output accuracy, avoiding reverse pulse direction and being more practical.

Description

technical field [0001] The invention relates to a control method of pulse power supply, in particular to a control method of pulse direction of pulse power supply. Background technique [0002] Pulse power supply has a good advantage in precious metal electroplating, and a good quality pulse output waveform plays a vital role. Usually, the output square wave is required such as figure 1 Shown, and the amplitude and time accuracy can be guaranteed within 1% of the electroplating quality. [0003] The existing pulse power supply control system includes two PID (proportional-integral-derivative) controllers, which respectively control the output base value and the output peak value. However, there is a problem in the existing pulse power supply control method when calculating the two control output values. When the A / D samples the peak value and base value of voltage and current, because the ripple of the pulse is relatively large, there will be a large error in sampling. Even...

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Problems solved by technology

[0003] The existing pulse power supply control system includes two PID (proportional-integral-derivative) controllers, which respectively control the output base value and the output peak value. However, there is a problem in the existing pulse power supply control method when calculating the two control output values. When the A / D samples the peak value and base value of voltage and current, because the ripple of the pulse is relatively large, there will be a large error in sampling. Even after filtering, the control signal still has errors, especially in the base value and peak value. When the setting value is very close to

[0004] In addition, although the AD sampling speed of DSP (Digital Signal Processing, digital signal processing) is very high, it is difficult to control the precise AD sampling time

In the program, if the sampling value at the moment of outputting the base value is wrongly input into the PID controller controlling the peak value, then the PID controller will mistake the base value feedback as the peak value feedback value, and then the PID controller will try to reduce the output, expecting The wrong base value feedback decreases, so the output peak value will continue to decrease, and the same reason the output base value will continue to increase, such as figure 2 The shown pulse is reversed, the base value is greater than the peak value, and the entire controller is in a positive feedback state, which is easy to damage the machine

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