Non-equal height comb teeth capacitive triaxial acceleration transducer and method for manufacturing same

Abstract

The invention discloses a non-equal height comb teeth capacitive triaxial acceleration transducer and a method for manufacturing the non-equal height comb teeth capacitive triaxial acceleration transducer. The transducer comprises an X axial and Y axial acceleration detection unit and a Z axial acceleration detection unit which are positioned on a silicon substrate, wherein the X axial and Y axial acceleration detection unit comprises a sensitive mass block for detecting X axial and Y axial acceleration, an L-shaped support spring beam, an equal height comb teeth difference capacitance sensitive movable comb teeth electrode pair and a fixed comb teeth electrode pair; and the Z axial acceleration detection unit comprises two sensitive mass blocks used for detecting Z axial acceleration, a linear support spring beam and a non-equal height comb teeth difference capacitance sensitive electrode pair. In the invention, as the three independent sensitive units and the non-equal height comb teeth difference capacitance electrode structure are adopted, the non-cross interference detection for accelerations on the three axes can be realized. As MEMS (Micro Electro Mechanical System) silicon and shallow etching process are adopted, the uniformity and the repeatability of the manufacturing process are good, and the flexibility, the reliability and the stability of the detection are higher.

Description

Technical field [0001] The invention relates to the technical field of sensors, in particular to a unequal height comb-tooth capacitive three-axis acceleration sensor and a manufacturing method thereof. Background technique [0002] In the automotive safety control system, the key technology lies in the development and application of high-performance sensors. "There is no modern car without sensor technology" has become the consensus in the industry, which means that the more advanced the car electronics, the higher the degree of automation, and the greater the dependence on sensors. In this regard, industry experts believe that in the future, new automotive application systems will give birth to new automotive sensors to support them. As a high-tech industry recognized at home and abroad with a promising future, the sensor industry has attracted worldwide attention for its high technical content, good economic benefits, strong penetration capability, and broad market prospects....

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Problems solved by technology

[0005] The purpose of the present invention is to solve the above-mentioned deficiencies in the prior art, to provide a unequal-height comb capacitive three-axis acceleration sensor and its manufacturing method, and integrate three independent acceleration sensing units and unequal-height combs on the same chip Tooth structure, using MEMS bulk silicon and shallow etching process, which solves the problems in the preparation process well, and the cross-test sensitivity is high

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