Method and system for detection of tool performance degradation and mismatch

A performance and learning system technology, applied in general control systems, reasoning methods, control/regulation systems, etc., can solve problems such as neglect

Active Publication Date: 2012-05-09
TOKYO ELECTRON LTD
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What's more, nascent phenomena that can originate from multiple interrelationships between different data generated by different

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  • Method and system for detection of tool performance degradation and mismatch
  • Method and system for detection of tool performance degradation and mismatch
  • Method and system for detection of tool performance degradation and mismatch

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Embodiment 900

[0097] Embodiment 900 illustrates a conceptualization knowledge store (CKM) 910 that includes various concepts (eg, attributes, entities, relationships, and procedures) necessary for the operation of self-conceptualization component 570 . Concepts in CKM 910 include (i) domain-specific concepts such as step, run, batch, maintenance interval, wet cleaning cycle, step measurement, wafer measurement, batch measurement, location on wafer, wafer area, wafer center, wafer edge, first wafer, last wafer, etc.; and (ii) general domain-independent concepts such as numbers, constants (e.g., e, π), variables, sequences, time series, matrices, time matrices, fine-grained behavior, coarse Granular behavior, and more. Self-conceptual components also include a large number of general-purpose functional relationships, such as addition, subtraction, multiplication, division, square, cube, power, exponent, logarithm, sine, cosine, tangent, error, and more, as well as various levels of detail and...

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Abstract

Autonomous biologically based learning tool system(s) and method(s) that the tool system(s) employs for learning and analysis of performance degradation and mismatch are provided. The autonomous biologically based learning tool system includes (a) one or more tool systems that perform a set of specific tasks or processes and generate assets and data related to the assets that characterize the various processes and associated tool performance; (b) an interaction manager that receives and formats the data, and (c) an autonomous learning system based on biological principles of learning. Objectively generated knowledge gleaned from synthetic or production data can be utilized to determine a mathematical relationship among a specific output variable and a set of associated influencing variables. The generated relationship facilitates assessment of performance degradation of a set of tools, and performance mismatch among tools therein.

Description

[0001] Cross References to Related Applications [0002] This application is a continuation-in-part of co-pending US Patent Application S / N.12 / 044,958, filed March 8, 2008, entitled "AUTONOMOUS BIOLOGICALLY BASED LEARNING TOOL." This application is also related to co-pending US Patent Application S / N.12 / 044,959, filed March 8, 2008, entitled "AUTONOMOUS ADAPTIVE SEMICONDUCTOR MANUFACTURING." The entire contents of these applications are hereby incorporated by reference. technical background [0003] Technological advances have resulted in increasingly complex process-driven automation equipment. A tool system used to achieve a particular goal or perform a particular highly technical process may typically include a number of functional elements used to achieve the goal or successfully perform the process, as well as various sensors that collect data to monitor the operation of the equipment. Such automated devices can generate vast amounts of data. Data can include vast amou...

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Application Information

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IPC IPC(8): G06F15/18G06N20/00
CPCG06N5/04G06N99/005G05B2219/37252G05B13/0265G05B2219/33041G05B19/4065G06N20/00Y02P90/80
Inventor S·考歇尔S·J·帕特尔杉岛贤次
Owner TOKYO ELECTRON LTD
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