Orthogonal optical path two-dimensional micro-focus collimation and three-dimensional coordinate sensor

Abstract

The invention relates to an orthogonal light path two-dimensional micro-focus collimation and three-dimensional coordinate sensor, belonging to a sensor. A first to a seventh connecting frames are arranged on an assembly platform in sequence; a four-dimensional adjusting frame, a spectroscope, a refracting-reflecting type long-focus system A, a refracting-reflecting type long-focus system B, a photoelectric receiver B and a photoelectric receiver A are respectively assembled on the first to the seventh connecting frame; a laser source is assembled on the four-dimensional adjusting frame; an optical fiber probe measuring bar provided with an optical fiber probe measuring head is arranged on a five-dimensional adjusting frame; and the photoelectric receiver A and the photoelectric receiver B are respectively connected with a data acquisition processor through data transmission lines. The orthogonal light path two-dimensional micro-focus collimation and three-dimensional coordinate sensor has the characteristics of zero coupling of two-dimensional sensing information, capability of carrying out detection in the two-dimensional direction, small measuring force, easy minimization, large measured ratio of pit-depth to pit-diameter, good real-time property and easy application, and has remarkable advantages in implementation of rapid and ultra-precise measurement and calibration on micro inside dimensional and three-dimensional coordinates.

Description

technical field [0001] The invention belongs to sensors, and mainly relates to an orthogonal optical path two-dimensional micro-focus collimation that can go deep into a micro-deep inner cavity to convert the position information of the optical fiber probe probe and the side wall of the inner cavity into position information of the beam energy center. with a three-dimensional coordinate sensor. Background technique [0002] With the continuous development of the aerospace industry, automobile industry, electronics industry and cutting-edge industries, the demand for precision micro-cavity components has increased dramatically. Due to the limitation of the space scale and the influence of the measurement contact force, the precise measurement of the inner dimensions of the tiny inner cavity components has become difficult to achieve, especially the measurement depth is difficult to increase, which has become a "bottleneck" restricting the development of the industry. In orde...

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Problems solved by technology

[0012] 1. It is difficult to further improve the displacement resolution of the detection system

The primary magnification of the existing detection system is low, resulting in a low overall magnification, and it is difficult to further improve its displacement resolution

The optical path magnification of the optical measuring rod used in the detection method adopted by the National Institute of Standards and Technology is only 35 times, and the low primary magnification makes it difficult to further improve the displacement resolution.

[0013] 2. The detection system has no absolute "0" position in the measurement direction

The existing detection methods for tiny inner cavities mainly judge the displacement of the optical fiber measuring rod through the two-dimensional images received by the area array CCD. This method does not have an absolute "0" position, which makes it difficult for the detection system to distinguish the polarity of the measurement elements. It is also difficult to obtain higher measurement repeatability

[0014] 3. The real-time performance of the detection system is poor, and it is difficult to achieve precise online measurement

The detection method adopted by the National Institute of Standards and Technology must use two-way area array CCDs to receive signal images, and since the magnification of the imaging optical path of the optical fiber measuring rod is only 35 times, a more complex image algorithm must be used to achieve high displacement of the optical fiber measuring rod. Resolution monitoring, which leads to a large increase in the amount of data that the measurement system needs to process, reduces the real-time performance of the detection system, and makes it difficult to realize the synchronization of the aiming signal and the start and stop measurement in the process of small inner cavity size and two-dimensional coordinate measurement

[0015] 4. Insufficient detection ability of two-dimensional displacement direction

The one-dimensional micro-focus alignment measurement method proposed by Harbin Institute of Technology based on single-fiber probe measuring rod has coupling in two-dimensional displacement sensing. When the measured displacement is two-dimensional displacement, the two-dimensional information obtained by this method There is a correlation between them, and they cannot be separated, resulting in a large error in the two-dimensional measurement, and the accurate measurement of the two-dimensional displacement cannot be realized

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