Partially-decoupled plane three-freedom-degree parallel precision positioning platform

Abstract

The invention discloses a partially-decoupled plane three-freedom-degree parallel precision positioning platform. The partially-decoupled plane three-freedom-degree parallel precision positioning platform comprises a movable platform and a fixed platform, wherein three groups of driving branches with the same structures are arranged between the movable platform and the fixed platform; and every group of driving branch comprises a pentatricopeptide repeats (PPR) driving chain which is formed by sequentially connecting a first movable pair, a second movable pair and a rotary pair. According to the PPR driving chain, a guide rail of the first movable pair is fixedly connected with the fixed platform, a guide rail of the second movable pair is fixedly connected with a slider of the first movable pair, one end of a rotary hinge of the rotary pair is connected with a slider of the second movable pair, and the other end of the rotary hinge of the rotary pair is connected with the movable platform. A motion input part is decoupled, and motion input in the X direction (Y direction) cannot cause driven motion in the X direction (Y direction). By the easy technical means, the defects that the conventional parallel mechanism is complicated in kinematic coupling and kinematic solution and fussy in designing and machining, and the like are overcome, the requirement for high precision of the precision positioning platform can be met, and the partially-decoupled plane three-freedom-degree parallel precision positioning platform has wide application prospect in the fields of precision machining, microelectronic manufacturing and the like.

Description

Technical field [0001] The invention relates to a position adjustment mechanism, in particular to a partially decoupled planar three-degree-of-freedom parallel precision positioning platform. Background technique [0002] Precision positioning platforms have a wide range of needs in the fields of microelectronics and precision machining. Currently widely used precision positioning platforms can be divided into two categories: series platforms and parallel platforms. The movement of each direction of the tandem platform is controlled by a set of independent driving devices, so the control is easy, but its structure is huge, the installation is cumbersome, the bottom freedom is large, and it is easy to wear and deform. Compared with the series platform, the parallel platform has the advantages of no cumulative error, high accuracy, fast dynamic response, compact structure, and good rigidity. Therefore, the parallel platform can better meet the requirements of precise positioning....

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