Semi-conductor processing management system and method

A management system and semiconductor technology, applied in the field of semiconductor process management system, can solve problems such as difficulty in improvement and lack of unified standards

Inactive Publication Date: 2013-05-15
CSMC TECH FAB2 CO LTD
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Problems solved by technology

[0004] However, although CPK can reflect the stability of machine operating parameters within the statistical time range to a certain extent, and give possible causes of problems, there are the following problems: At present, for the SPEC range of each machine operating parameter, They are all set according to each manufacturer's understanding of the process, lack of uniform standards, and will not change after setting, which makes it difficult to appear on the machine if the range set by SPEC is not very reasonable. When there is a problem, analyze the cause of the problem, which brings difficulties to the follow-up improvement

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  • Semi-conductor processing management system and method

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[0026] As mentioned in the background technology section, the existing FDC system only has the function of analyzing the process performance of the machine, but does not analyze the rationality of SPEC. This will lead to an unreasonable situation when the company sets the SPEC range by itself. The unreasonableness of this SPEC will affect FDC's judgment on CPK. For example, if the SPEC range is set too large, it is easy to cover up many bad situations, which will reduce the ability of FDC to monitor CPK, that is, there are obviously problems or instability in the machine, but the CPK calculated by FDC is still at an excellent value. As a result, personnel continue to produce without discovering the problem of the machine in time, and eventually a large number of products will be defective or even scrapped, seriously affecting the production cost of the enterprise. When the SPEC range is set too narrow, it is easy to make the CPK value calculated by FDC too small, resulting in...

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Abstract

Provided is a semi-conductor processing management system and a method. The semi-conductor processing management system comprises a specification providing device, a data collector, a computer and a judging and reminding device. On the basis of an existing flippy disc controller (FDC), the semi-conductor processing management method increases a function which can analyze the range of standard performance evaluation corporation (SPEC), thereby enabling the FDC to calculate the value of complex process capability index (CPK) under the appropriate range of the SPEC, so that support staff can correctly analyze working conditions of various computers, problems can be timely and effectively discovered and reasonability and effectiveness of the entire processing are guaranteed.

Description

technical field [0001] The invention relates to a semiconductor process management system and method, in particular to a semiconductor process management system and method using statistical control. Background technique [0002] During semiconductor manufacturing, semiconductor products usually go through a series of manufacturing steps using various tools, such as photolithography, chemical-mechanical polishing, or chemical vapor deposition. For example, a 15-micron semiconductor product may undergo close to 600 processing steps. The cost required to effectively control or supervise such a complicated process is very expensive, so the semiconductor products produced must have a high product yield to reduce the cost of the automated manufacturing. However, the machines in each process step may be changed or unstable, resulting in defects in several or a whole batch of semiconductor products. Therefore, the machines in each semiconductor process step should be able to stabi...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/67H01L21/02
Inventor 马小焰叶日铨张建军翁雪平
Owner CSMC TECH FAB2 CO LTD
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