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Developing unit

A developing device and developing solution technology, applied in the fields of display panels and display devices, can solve problems such as differences in developing graphics, and achieve the effect of improving speed and quality

Inactive Publication Date: 2014-10-01
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0007] The purpose of the present invention is to solve the problem of the differences in the development pattern at different positions in the large-size substrate development process of the prior art, and to provide a developing device that can improve the uniformity of the development pattern of the large-size substrate

Method used

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Embodiment 1

[0027] Such as figure 2 As shown, this embodiment provides a developing device, including: a base 1 and a lifting unit 2 provided on the base 1, the lifting unit 2 is provided with a carrying unit 3, and the carrying unit 3 is provided with a conveying unit 4, The conveying unit 4 is used to transport the substrate 5 to be developed to a predetermined developing position; a developing solution spraying unit 6 is arranged above the developing position, which is used to spray developing solution to the substrate 5 for developing; the carrier unit 3 and the substrate 5 are conveyed The two sides in parallel direction are connected with the lifting unit 2; the lifting unit 2 can make one of the two sides parallel to the conveying direction of the substrate 5 perform at least one interactive tilting movement relative to the other side. That is, at some point during development figure 2 The right side of the middle substrate 5 is higher than the left side, and the left side of th...

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Abstract

The invention provides a developing unit, belonging to the field of display technology. The developing unit solves the problem of difference of developing images at different positions in an existing large-size base plate developing process. The developing unit enables the different parts of a base plate to be subjected to uniform developing due to at least one interactive inclining motion of the base plate in the developing process, and therefore, a uniform image can be formed; besides, the angle of the interactive inclining motion can be freely adjusted, so that developing residues can be timely removed and the developing speed and the developing quality can be promoted.

Description

technical field [0001] The invention belongs to the field of display technology, and in particular relates to a display panel and a display device. Background technique [0002] Photolithography and development are indispensable processes in the semiconductor manufacturing industry, especially in the manufacturing process of liquid crystal displays. After the photolithography process on the glass substrate, the etched pattern must be developed before it can be displayed. Therefore, the development process directly determines the quality of the liquid crystal display. [0003] Such as figure 1 As shown, the developing device in the prior art includes: a base 1 arranged at a certain angle (β in the figure) with the horizontal direction, and a transfer unit 4 is arranged above the base 1, and the transfer unit 4 is used to transfer the The developed substrate 5 is transported (the transport direction is figure 1 The direction shown in the middle y-axis) to a predetermined d...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/30
Inventor 李晓光汪栋吴洪江肖宇
Owner BOE TECH GRP CO LTD
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