Micro-region fluorescent scanning measurement system

Abstract

The invention discloses a micro-region fluorescent scanning measurement system which comprises an exciting light source, an excitation light path part, a fluorescence signal collection light path part, a micro-region imaging light path part, a table-board, a two-dimensional electric translation system, a vacuum sample chamber, a vacuum pump, a low-temperature system and temperature control device, a grating spectrometer and a CCD detector, wherein the input end of the excitation light path part is connected with the exciting light source, and the output end of the excitation light path part is connected with the vacuum sample chamber; the excitation light path part is used for guiding laser to income into a sample in the vacuum sample chamber; the fluorescence signal collection light path part is used for collecting a fluorescence signal emitted from the sample; the micro-region imaging light path part is connected with the excitation light path and the fluorescence signal collection light path and is used for micro-region imaging and positioning of the sample surface topography; the excitation light path and the fluorescence signal collection light path part are arranged on the table-board; the two-dimensional electric translation system drives the table-board to do a two-dimensional scanning motion; the vacuum sample chamber is used for placing the sample; the vacuum pump is used for maintaining the vacuum degree of the vacuum sample chamber; according to the low-temperature system and temperature control device, the vacuum degree of the vacuum sample is maintained, and the sample chamber is maintained in a needed low temperature environment; the grating spectrometer is used for processing the fluorescence signal; and the CCD detector is used for acquiring the fluorescence signal.

Description

technical field [0001] The invention belongs to the field of spectroscopic instruments and spectroscopic technology, in particular to an improved self-made low-temperature (normal temperature) micro-area fluorescence scanning measurement system. Background technique [0002] Spectroscopy is an important means to use the interaction between light and matter to study the physical and chemical properties of matter. It has a wide range of applications in many fields such as physics, chemistry, and biology, especially in the detection and characterization of semiconductor surfaces. It has an irreplaceable position. Taking semiconductor applications as an example, common spectral characterization methods include emission spectroscopy, absorption spectroscopy, photoluminescence (fluorescence) spectroscopy, and Raman spectroscopy. The early spectroscopic technology was limited by the light source. After the invention of the laser, due to the ability to obtain coherent light wave out...

AI Technical Summary

Problems solved by technology

When the required temperature is very low, cryogenic devices are often very bulky (for example, cryogenic liquid nitrogen devices are usually 40-90KG), at this time it becomes more difficult to move the sample for scanning, and the scanning accuracy is often difficult to meet the requirements

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