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Photoresist spraying equipment

A photoresist and nozzle technology, applied in the field of photoresist spraying equipment, can solve the problems affecting the coating quality and effect, single coating type and squeegee method, and application limitations of coating technology, achieving high reliability, Strong anti-interference ability

Inactive Publication Date: 2015-07-29
NANJING YUHUATAI DISTRICT INTPROP PROMOTION CENT
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

At present, coating technology and equipment are not only used in printing and packaging enterprises in China, but also in many electronics and liquid crystal industries. The types of coating and squeegee methods are relatively simple, and the application of coating technology is also greatly restricted.
No matter what kind of coating compound equipment, what kind of coating scraping method is used, it will directly affect the quality and effect of coating

Method used

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  • Photoresist spraying equipment

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Embodiment Construction

[0014] Below in conjunction with accompanying drawing and specific embodiment, further illustrate the present invention, it should be understood that following specific embodiment is only for illustrating the present invention and is not intended to limit the scope of the present invention, after having read the present invention, those skilled in the art will understand the invention Modifications in various equivalent forms fall within the scope defined by the appended claims of the present application.

[0015] A photoresist coating disclosed in the present invention is characterized in that: the photoresist spraying equipment includes a photoresist storage, a photoresist pipeline, an ultrasonic generator, a nozzle, and a transmission belt. The liquid photoresist is stored in the photoresist memory 1 and enters the photoresist pipeline 2 through the output port. The photoresist pipeline 2 is equipped with a temperature controller to control the liquefaction state of the phot...

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Abstract

The invention discloses photoresist spraying equipment which comprises a photoresist storage device, a photoresist pipeline, an ultrasonic generator, a nozzle and a conveying belt. In a closed environment, a liquid photoresist is stored in the photoresist storage device and enters the photoresist pipeline via an output port, a temperature controlled is attached to the photoresist pipeline to control the liquefaction state of the photoresist, the photoresist pipeline is connected with the ultrasonic generator, the ultrasonic generator gasifies the liquid photoresist in the photoresist pipeline and then sprays the photoresist out of the nozzle, a to-be-coated object is fixed on the conveying belt for assembly line type conveyance, and the whole coating process is finished. The system equipment is simple, easy to operate, advanced in coating technology, more uniform in coating effect, time-saving and labor-saving, the cost is saved for an enterprise, and the increase of earnings is promoted.

Description

technical field [0001] The invention discloses a spraying equipment, in particular to a photoresist spraying equipment. Background technique [0002] Coating technology is widely used in paper, film, glass substrate coating and composite packaging. At present, coating technology and equipment are not only used in printing and packaging enterprises in China, but also in many electronics and liquid crystal industries. The types of coating and squeegee methods are relatively simple, and the application of coating technology is also greatly restricted. No matter what kind of coating compound equipment, what kind of coating and squeegee method is used, it will directly affect the quality and effect of coating. Contents of the invention [0003] In view of the above problems, the present invention discloses a photoresist spraying equipment. In a closed environment, the photoresist memory transports the photoresist into the pipeline, controls the temperature in the pipeline thr...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/16B05B17/06B05B12/10B05B13/02
Inventor 张靓
Owner NANJING YUHUATAI DISTRICT INTPROP PROMOTION CENT
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