Lloyd mirror interference microscopic scale measuring device

A measuring device and micro-scale technology, applied in the direction of measuring devices, optical devices, instruments, etc., can solve problems such as difficulty in ensuring the horizontal state of the plane mirror, time-consuming, and affecting measurement results, etc., to reduce human observation errors and high efficiency , Improve the effect of measurement accuracy

Active Publication Date: 2016-04-27
JIANGHAN UNIVERSITY
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Problems solved by technology

[0007] The above-mentioned measuring device has the following defects: the measurement accuracy is affected by factors such as ambient temperature and vibration, and when measuring the distance between interference fringes, there are errors when observing the fringes with the human eye; it is difficult to ensure that the plane mirror is in a horizontal state during the experiment, and the measured object is placed under the plane mirror When , the plane mirror and the horizontal plane often have a certain angle, which will affect the measurement results; and the calculation of the data from the human eye observation takes a long time and is not efficient

Method used

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Embodiment Construction

[0024] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments, so as to facilitate a clear understanding of the present invention, but they do not limit the present invention.

[0025] like Figure 2-5 As shown, the present invention includes a light source 1, a lens 2, a slit device 3, a plane mirror 4, a light screen 5, a photoelectric conversion device 10, a data processing module 11, a lever linkage device 9 and a base plate 12. After the lens 2, the slit device 3 and the plane mirror 4, interference fringes are generated on the optical screen 5, the detector head of the photoelectric conversion device 10 is connected to the optical screen 5, and the output end of the photoelectric conversion device 10 is connected with the input end of the data processing module 11. Electrically connected, the plane mirror 4 is installed on the top of one end of the lever linkage device 9 through the guide devic...

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Abstract

The invention discloses a Lloyd mirror interference microscopic scale measuring device. The Lloyd mirror interference microscopic scale measuring device comprises a light source, a lens, a slit device, a plane mirror, a photoelectric conversion device, a data processing module, a lever linkage device and a bottom plate, wherein light emitted by the light source generates interference fringes on an optical screen after passing through the lens, the slit device and the plane mirror a detection head of the photoelectric conversion device is connected with the optical screen, an output end of the photoelectric conversion device is electrically connected with an input end of the data processing module, the plane mirror is installed at the top part of one end of the lever linkage device through a guide device, the bottom part of another end of the lever linkage device is provided with an object stage, and the lever linkage device and the guide device are fixed on the bottom plate. The Lloyd mirror interference microscopic scale measuring device adopts a mechanical lever principle to reflect microscopic scale of an object to be measured in the vertical distance between the plane mirror and the slit device, and has the advantages of simple structure, convenient and rapid measurement, high efficiency, high precision and high practicality.

Description

technical field [0001] The invention belongs to the technical field of modern precision measurement, in particular to a Lloyd mirror interference micro-scale measurement device. Background technique [0002] Using Lloyd's mirror, starting from the principle of light interference, the change of the rising height of the Lloyd's mirror is converted into the change of the interference fringe spacing to measure the thickness of the object. This method is not only simple to operate, but can be completed in an ordinary optical laboratory. , suitable as a student experiment, and has high precision and strong practicability. [0003] Existing measuring devices such as figure 1 As shown, it includes a light source 1, a lens 2, a slit device 3, a plane mirror 4, a light screen 5, an object stage 6 and a micrometer eyepiece 7, and the vertical height between the plane mirror and the slit on the slit device is l, The light emitted by the light source generates interference fringes on t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/00G01B11/06
CPCG01B11/00G01B11/06
Inventor 吕洪方谭小平高熔蔓王锦根
Owner JIANGHAN UNIVERSITY
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