Carbon brushless rotating plasma electrode structure and coating system

Abstract

The invention discloses a carbon brushless rotating plasma electrode structure and a coating system. The brushless rotating plasma electrode structure includes a body, a plurality of guide parts and a plurality of conductive parts. The body includes a plurality of electrode parts. A first protruding portion is provided on the periphery of the electrode portion. The guide part penetrates the electrode part. Each conductive member includes a second protruding part, and there is a gap between the first protruding part and the second protruding part.

Description

Technical field [0001] The invention relates to an electrode structure and a coating system, and more particularly to a carbon brushless rotating plasma electrode structure and a coating system including a carbon brushless rotating plasma electrode structure. Background technique [0002] figure 1 It is a schematic diagram of the carbon brush type rotating plasma electrode structure in the prior art. See figure 1 . [0003] The prior art carbon brush type rotating plasma electrode structure 10 is composed of two electrode parts 11, two guiding parts 12, a spacer 13, a carbon brush 14 made of graphite, an RF generator 15 and a ground electrode 16. The isolation portion 13 is located between the two electrode portions 11. The guiding portion 12 penetrates through the two electrode portions 12. The carbon brush 14 is arranged on the periphery of the electrode portion 11. The RF generator 15 and the ground electrode 16 are respectively coupled to one end of the corresponding carbon...

AI Technical Summary

Problems solved by technology

However, the rotating electrode part 11 will rub against the carbon brush 14, so frictional heat will be generated to generate high temperature, and there may be a risk of fire under long-term operation.

[0005] Furthermore, the rubbed carbon brush 14 will also produce dust (particles), and these dusts will fall to the workpiece to cause pollution, and cause the workpiece after plasma treatment to have a problem of poor yield.

In the prior art, the dust cover is used to collect dust to reduce the probability of dust falling to the workpiece, but it still cannot solve the problem of high temperature generated by the electrode part 11 rubbing the carbon brush 14, which in turn leads to an increase in impedance

It can be seen that the carbon brush type rotating plasma electrode structure 10 of the prior art also has the problem of high impedance, which will lead to poor RF energy generated.

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