Radio frequency switch device based on electrowetting driving principle and preparation method thereof

Abstract

The invention discloses a radio frequency switch device based on the electrowetting driving principle and a preparation method thereof. The device comprises a lower polar plate, an upper polar plate and liquid drops placed between the lower polar plate and the upper polar plate. The lower polar plate comprises a first substrate, a driving electrode layer, a dielectric layer, a radio frequency electrode layer and a first hydrophobic layer, which are arranged in turn. The upper polar plate comprises a second substrate, a ground electrode and a second hydrophobic layer, which are arranged in turn. The liquid drops are placed between the first hydrophobic layer and the second hydrophobic layer. According to the radio frequency switch device disclosed by the invention, an aqueous solution is driven to move to different positions to control the on-off of a radio frequency circuit, so that the control is simple, the automation degree is high, and the application range of microfluidic, radio frequency switch and other techniques is greatly expanded.

Description

technical field [0001] The invention belongs to the field of radio frequency circuits and switches, and relates to microfluidic technology based on the principle of electrowetting and the absorption of high-frequency electromagnetic field energy by liquids, in particular to a radio frequency switch device based on the principle of electrowetting and a preparation method thereof. Background technique [0002] In recent years, radio frequency circuits have developed rapidly in fields such as the Internet of Things and communication systems. As a control component of radio frequency circuits, radio frequency switches have also attracted much attention. Commonly used radio frequency switches mainly include transistor switches and micromechanical switches. Although the switching speed of the transistor switch is fast, it has disadvantages such as large on-resistance, small off-resistance, and low applicable power; while the micromechanical switch has better performance than a res...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a radio frequency switch device based on the electrowetting driving principle and its preparation method. This device solves the problems of difficult preparation and wear and tear of traditional diode switches or micromechanical switches in the prior art, and can be passed through The electrowetting effect controls the position of the droplet, which in turn controls the on-off of the radio frequency circuit

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