The application provides a method and device for preparing a three-dimensional
atom probe needle tip of a low-Mohs
hardness geological sample, and belongs to the technical field of material preparation. The method provided by the application comprises the following steps: depositing a Pt protective layer on a target region; milling the periphery of the Pt protective layer on the geological sample by using an
ion beam to form a three-
prism-shaped long strip sample, and transferring the three-
prism-shaped long strip sample to a
silicon column; tilting a sample table to make the direction of the
ion beam be perpendicular to the top surface of the sample welded on the
silicon column and downward, determining the size parameters of a ring
cutting step and a ring-shaped
ion beam, and performing multiple ring
cutting on the sample on the
silicon column until the sample on the silicon column is processed into a target shape. The method and device for preparing the three-dimensional
atom probe needle tip of the low-Mohs
hardness geological sample can make the complex ring
cutting process be streamlined, reduce the preparation difficulty of the needle tip sample, and improve the
operability and success rate of
sample preparation by refining the ring cutting step and optimizing the size parameters of the ring-shaped
ion beam.