The present invention relates to a device and method for preparing a standard
mixed gas using a flow meter under vacuum conditions, the device comprising: a
trace gas sampling pipeline, comprising a first
gas cylinder, a first valve, a second valve, a first
vacuum chamber, a third valve, a first high
vacuum pump unit, a first vacuum gauge and a second vacuum gauge; other gas sampling pipelines, comprising a second
gas cylinder, an eleventh valve, a ninth valve, a third
vacuum chamber, a tenth valve, a second high
vacuum pump unit, a fifth vacuum gauge and a sixth vacuum gauge; a
mixed gas pipeline, comprising a fourth valve, a standard flow conductance element, a fifth valve, a sixth valve, a second
vacuum chamber, a seventh valve, an eighth valve, a twelfth valve, a third vacuum gauge and a fourth vacuum gauge; the first vacuum chamber is connected to the fourth valve, and the third vacuum chamber is connected to the seventh valve, the eighth valve and the twelfth valve. The device of the present invention is simple, low in cost and easy to operate, and can extend the
lower limit of the preparation ratio of preparing a standard
mixed gas to 2×10 ‑10 .