137results about "Machining working media" patented technology

A new method of creating thin free-standing pin hole-free hydrogen-selective palladium-bearing membranes that comprises thinning cold-rolled membranes by chemical etching or electrochemically electrolyzing of at least one membrane surface, and novel membranes produced thereby and including membranes with selected portions only thereof so thinned.

The present invention relates to a polishing liquid for polishing the surface of a substrate having a copper film and fine recesses filled with the copper, comprising, at least one water-soluble inorganic acid or its salt, or water-soluble organic acid or its salt, and at least one hydroxyquinoline.

Electrolyte compositions and methods for planarizing a surface of a substrate using the electrolyte compositions are provided. In one aspect, an electrolyte composition includes one or more chelating agents, one or more corrosion inhibitors, and one or more pH adjusting agents. In another aspect, an electrolyte composition includes one or more chelating agents, two or more corrosion inhibitors, and one or more pH adjusting agents. In another aspect, an electrolyte composition includes one or more chelating agents, one or more corrosion inhibitors, one or more pH adjusting agents, and one or more electrically resistive additives.

Compositions and methods for processing a substrate having a conductive material layer disposed thereon are provided. In one embodiment, a composition for processing a substrate having a conductive material layer disposed thereon is provided which composition includes an acid based electrolyte, a chelating agent, a corrosion inhibitor, a passivating polymeric material, a pH adjusting agent, a solvent, and a pH between about 3 and about 10. The composition is used in a method to form a passivation layer on the conductive material layer, abrading the passivation layer to expose a portion of the conductive material layer, applying a bias to the substrate, and removing the conductive material layer.

A polishing pad includes a guide plate having a plurality of holes therein and being affixed to a compressible under-layer; and a plurality of conducting polishing elements each affixed to the compressible under-layer and passing through a sealed contact with a proton exchange membrane and corresponding hole in the guide plate so as to be maintained in a substantially vertical orientation with respect to the compressible under-layer but being translatable in a vertical direction with respect to the guide plate. The polishing pad may also include a slurry distribution material fastened to the guide plate by an adhesive. Pad wear sensors may also be provided in the polishing pad.

Polishing compositions and methods for removing conductive materials from a substrate surface are provided. In one aspect, a composition includes an acid based electrolyte system, a corrosion inhibitor having an azole group, an organic acid salt, a pH adjusting agent to provide a pH between about 2 and about 10, and a solvent, and a solvent. The composition may be used in a conductive material removal process including disposing a substrate having a conductive material layer formed thereon in a process apparatus comprising an electrode, providing the composition between the electrode and substrate, applying a bias between the electrode and the substrate, and removing conductive material from the conductive material layer. The polishing compositions and methods described herein improve the effective removal rate of materials from the substrate surface, such as copper, with a reduction in planarization type defects and yielding a desirable surface finish.

An electrolytic turning method for machining the internal and external rotary surfaces and their end face includes such steps as fixing the tool as cathode in the electrolyzer fixed onto a movable bench of machine-tool, fixing the workpiece as anode to the lower end of a mainshaft of machine-tool, regulating the gap between said cathode and anode, and using an electrolyte pump to make the electrolyte to cyclically flow through said gap while machining the workpiece.

A novel method of electrochemical treatment such as electroplating, etc. and an electrochemical reaction apparatus thereof which is high in reactability and able to be electrochemically reacted efficiently, which is small or zero in amount of generation of liquid waste such as electrolytic solution and cleaning liquid and therefore, amicable to the environment, and in which it is no more required to clean the electrode, etc. with cleaning liquid after reaction. Electrochemical reaction is executed in a reaction vessel (6) containing matter (5) which is in a supercritical or subcritical state and an electrolytic solution (1), and after reaction, the supercritical or subcritical matter (5) is shifted into a state of the matter (5) before being shifted into a critical state.

An electric spark and electrolysis combined milling machining method of a micro three-dimensional structure belongs to the technical field of micromachining, and is characterized in that a plurality of metal alloy material and complicated cavities and surfaces can be machined through adopting simple electrodes to operate the combined machining of micro electric spark milling and micro electrolysis milling by means of the layered milling principles. The combined machining method has two steps of fast finishing the most of machining through adopting the machining method of the micro electric spark closed-loop gap servo scanning and milling, then carrying out the residual machining through adopting the machining method of the micro electrolysis layered open-loop digital control scanning and milling, thereby finally finishing the shaping of a micro three-dimensional structure, wherein a machining electrode whose side wall is insulated is used in the electrolysis milling for improving the machining localization and machining precision. The method fully utilizes the advantages that the micro electric spark servo scanning and milling has fast machining speed, and the micro electrolysis digital control milling can not abrade the machining electrode, and has excellent surface machining quality.

This invention provides membrane-mediated electropolishing (MMEP) processes for polishing and / or planarizing metal work pieces using topographically patterned membranes. The processes can be used for both pure metals and alloys, and provide advantages over conventional electropolishing processes and known MMEP processes using smooth membranes. This invention also provides a cathode half-cell and an apparatus useful in membrane-mediated electropolishing processes. The invention also provides processes for electroengraving and electromachining topographic patterns, holes and / or grooves into the surface of a metal work piece.

The invention provides an electrochemical-mechanical polishing composition comprising: (a) a chemically inert, water-soluble salt, (b) a corrosion inhibitor, (c) a polyelectrolyte, (d) a complexing agent, (e) an alcohol, and (f) water. The invention also provides a method of polishing a substrate comprising one or more conductive metal layers, the method comprising the steps of: (a) providing a substrate comprising one or more conductive metal layers, (b) immersing a portion of the substrate in an electrochemical-mechanical polishing composition, the polishing composition comprising: (i) a chemically inert, water-soluble salt, (ii) a corrosion inhibitor, (iii) a polyelectrolyte, (iv) a complexing agent, (v) an alcohol, and (vi) water, (c) applying an anodic potential to the substrate, the anodic potential being applied to at least the portion of the substrate immersed in the polishing composition, and (d) abrading at least a portion of the immersed portion of the substrate to polish the substrate.

The invention discloses an electrolytic machining technique of a micro-groove on an inner wall surface of a small aperture and a device. The technique is that: a cathode of a forming tool of a variable cross-section structure which is provided with insulation sections and conductive sections at intervals and is made of conductive metal wires of 200 to 1000 mum is positioned in an unthreaded hole of a workpiece which is processed in advance by utilizing the electrolytic machining device of the invention, the workpiece is taken as an anode, then electrolytic solution is radially flowed along an electrode wire, the electrolytic machining is carried out in the unthreaded hole, the pressure of the electrolytic solution is maintained at 1 to 5 MPa, and the micro-groove structure is obtained at the inner wall surface of the unthreaded hole by flushing the products after the processing. The diameter size of the cathode of the forming tool which is prepared by adopting the ultra-violet light masking solidification technology and the electroforming process can be as small as a few hundred microns, and a rib cooling hole structure with the hole diameter size of about 1mm can be obtained by combining the electrolytic machining technique. The adopted technical process of the invention is easy to master and has small investment, the minimal hole diameter which can be processed is small, and the processing precision is high.

An electrolyte solution containing an alkylene glycol and a chloride salt is useful for electropolishing metal substrates. An electropolishing method using the electrolyte solution is effective for polishing a varied of metals, including titanium and noble metals. The method avoids the handling and disposal challenges associated with previous methods using etching solutions containing hydrofluoric acid. A method of recycling the spent electrolyte solution is also described.

Polishing compositions and methods for removing conductive materials from a substrate surface are provided. In one aspect, a composition includes an acid based electrolyte system, one or more chelating agents, one or more corrosion inhibitors, one or more inorganic or organic acid salts, one or more pH adjusting agents to provide a pH between about 3 and about 10, a polishing enhancing material selected from the group of abrasive particles, one or more oxidizers, and combinations thereof, and a solvent. The composition may be used in an conductive material removal process including disposing a substrate having a conductive material layer formed thereon in a process apparatus comprising an electrode, providing the composition between the electrode and substrate, applying a bias between the electrode and the substrate, and removing conductive material from the conductive material layer.

Polishing compositions and methods for removing conductive materials from a substrate surface are provided. In one aspect, a method is provided for processing a substrate to remove conductive material disposed over narrow feature definitions formed in a substrate at a higher removal rate than conductive material disposed over wide feature definitions formed in a substrate by an electrochemical mechanical polishing technique. The electrochemical mechanical polishing technique may include a polishing composition comprising an acid based electrolyte system, one or more chelating agents, one or more corrosion inhibitors, one or more inorganic or organic acid salts, one or more pH adjusting agents to provide a pH between about 2 and about 10, and a solvent.

Disclosed is an electrolyte for electrochemical machining of a metal product, which can reduce a defect of an electro-chemical machining product, increase a lifespan of an electrolyte and an electrode, and improve efficiency of the electrochemical machining. The electrolyte includes an inorganic salt and at least one of a complexing agent and a reducing agent in a solvent.

A drive head for a bolt, fastener, coupling, nut or other driveable head made from a less malleable metal such as a powder metal nickel alloy. The drive head has an upper drive portion having at least six convex corners spaced around the outer periphery thereof, each corner terminating in an edge. The drive head also has a lower flange portion adjacent to the drive portion and having an edge extending radially outwardly to at least the edge of each corner. The drive portion and the flange portion of the drive head is formed by subjecting a blank having a generally circular head to electrochemical machining (ECM). A tool is also provided for the ECM method to form the drive portion and flange portion of the drive head.

Polishing compositions and methods for removing conductive materials from a substrate surface are provided. In one aspect, a composition includes an acid based electrolyte system, one or more chelating agents, one or more corrosion inhibitors, one or more inorganic or organic acid salts, one or more pH adjusting agents to provide a pH between about 2 and about 10, a polishing enhancing material selected from the group of abrasive particles, one or more oxidizers, and combinations thereof, and a solvent. The composition may be used in an conductive material removal process including disposing a substrate having a conductive material layer formed thereon in a process apparatus comprising an electrode, providing the composition between the electrode and substrate, applying a bias between the electrode and the substrate, and removing conductive material from the conductive material layer.

An electroerosion machining system comprises one or more electrodes configured to machine a workpiece, a power supply configured to energize the workpiece and the respective one or more electrodes, an electrolyte supply configured to pass an electrolyte, and a working apparatus configured to move the respective one or more electrodes relative to the workpiece. The electroerosion machining system further comprises a controller configured to control the working apparatus to machine the workpiece, and a removal agent configured to cooperate with the electrolyte from the electrolyte supply for removal of removed material from the workpiece. An electroerosion machining method is also presented.

A novel method of electrochemical treatment such as electroplating, etc. and an electrochemical reaction apparatus thereof which is high in reactability and able to be electrochemically reacted efficiently, which is small or zero in amount of generation of liquid waste such as electrolytic solution and cleaning liquid and therefore, amicable to the environment, and in which it is no more required to clean the electrode, etc. with cleaning liquid after reaction. Electrochemical reaction is executed in a reaction vessel (6) containing matter (5) which is in a supercritical or subcritical state and an electrolytic solution (1), and after reaction, the supercritical or subcritical matter (5) is shifted into a state of the matter (5) before being shifted into a critical state.

The present invention belongs to the field of tool making technology, and is especially technological process of machining high speed steel screw tap. The technological process includes the steps of machining blank, coarse machining, heat treatment, precise machining, inspection, packing, etc. The technological process features the cold treatment after heat treatment at the temperature from -180deg.C to -160deg.C for 8-10 hr; and the edge shape machining electrochemical step after the precise machining step. During the edge shape machining electrochemical step, the screw tap connected to the positive pole of power source and the graphite connected to the negative pole are set into composite water solution of NaNO3 in 9-20 % concentration and NaOH in 2-7 % concentration, and DC voltage in 10-20 V is applied. The cryogenic treatment raises the wear resistance of the tap, and the electrochemical edge trimming raises the quality of the edge, the durability and stability of the tap.

An anode as a workpiece, and a cathode opposed to the anode with a predetermined spacing are placed in ultrapure water. A catalytic material promoting dissociation of the ultrapure water and having water permeability is disposed between the workpiece and the cathode. A flow of the ultrapure water is formed inside the catalytic material, with a voltage being applied between the workpiece and the cathode, to decompose water molecules in the ultrapure water into hydrogen ions and hydroxide ions, and supply the resulting hydroxide ions to a surface of the workpiece, thereby performing removal processing of or oxide film formation on the workpiece through a chemical dissolution reaction or an oxidation reaction mediated by the hydroxide ions. Thus, clean processing can be performed by use of hydroxide ions in ultrapure water, with no impurities left behind on the processed surface of the workpiece.

In a state where a silicon base material (1) is used as an anode, a fine platinum member (2) is used as a cathode, and an electrolyte solution (4) is arranged between the anode and the cathode, anodicoxidation is performed in constant current mode under the conditions where porous formation mode and electrolytic polishing mode coexist. The platinum member (2) is fitted in the silicon base material (1) with silicon elution, and processes such as hole making, cutting, single-side pressing are performed. Since the silicon base material can be processed at a room temperature with small energy, the crystal quality of the processing surface is not deteriorated. Thus, efficient and highly accurate processing can be performed without using a mechanical method, which consumes much material in conventional processes such as cutting of solar cell silicon base material, and without using laser whose energy unit cost is high, and furthermore, without leaving a crystal damage on a processed surface.

The invention discloses an ultrasonic-frequency vibrating combined micro-electrical discharge and electrolysis machining device and belongs to the technical field of combined precise and micro special machining. According to the ultrasonic-frequency vibrating combined micro-electrical discharge and electrolysis machining device, ultrasonic-frequency vibration at a certain frequency is applied to a tool electrode and a workpiece, so that the workpiece machining efficiency is effectively improved; an ultrasonic vibration device is structurally symmetrical, and thus the workpiece machining stability is improved; the workpiece is assisted with ultrasonic vibration through the ultrasonic vibration device, and thus transverse electrical machining and longitudinal electrical machining are facilitated. According to a feeding mechanism of the machining device, a servo motor is preferably used for driving a workbench mechanism to finely move on a ball screw guide rail for feeding, fine feeding can be achieved through the feeding mechanism, and thus machining of a complicated curve surface of the workpiece can be achieved. The ultrasonic-frequency vibrating combined micro-electrical discharge and electrolysis machining device is novel in structure, and the electrical machining efficiency and precision are effectively improved; the defects that during ultrasonic combined electric machining of a workpiece with a large depth-diameter ratio, the efficiency is low, and it is quite difficult to machine a complicated special-shaped surface are overcome.

Compositions and methods for processing a substrate having a conductive material layer disposed thereon are provided. In one embodiment, a composition for processing a substrate having a conductive material layer disposed thereon is provided which composition includes an acid based electrolyte, a chelating agent, a corrosion inhibitor, a passivating polymeric material, a pH adjusting agent, a solvent, and a pH between about 3 and about 10. The composition is used in a method to form a passivation layer on the conductive material layer, abrading the passivation layer to expose a portion of the conductive material layer, applying a bias to the substrate, and removing the conductive material layer.

An electrolyte solution containing an alkylene glycol and a chloride salt is useful for electropolishing metal substrates. An electropolishing method using the electrolyte solution is effective for polishing a varied of metals, including titanium and noble metals. The method avoids the handling and disposal challenges associated with previous methods using etching solutions containing hydrofluoric acid. A method of recycling the spent electrolyte solution is also described.

The invention provides a method for reducing the electrode vibration amplitude of a tubular electrode during electrolytic machining. The method comprises the following steps: adding an aluminum oxide grinding material into electrolyte used in electrolytic machining, properly adding a dispersing agent, and forming electrolyte suspension liquid of the aluminum oxide grinding material; performing corresponding side surface insulation treatment on the tubular electrode used in electrolytic machining, wherein during machining, electrolyte downwards flows in the tubular electrode and is outwards sprayed from an outlet in the lower end of the tubular electrode. As the damp of the electrolyte added with the aluminum oxide grinding material is higher, the damp to the tubular electrode is increased during vibration, vibration caused by flowing of the electrolyte and insufficient rigidity of the tubular electrode is reduced, and the amplitude is reduced; meanwhile, the aluminum oxide grinding material in the electrolyte flows through an electrolytic machining region along with the electrolyte, and aluminum oxide grinding particles in the grinding material are in contact with the machined surface of a workpiece, so that a grinding effect is achieved, a flow marker on the machined surface of the workpiece is eliminated, and the coarseness on the machined surface of the workpiece and the machining precision are improved.