Method for processing silicon base material, article processed by the method, and processing apparatus

A processing method and processing device technology, applied in the field of processed products and processing devices of crystalline silicon substrates, can solve the problem of high manufacturing cost
CN101680106AInactive Publication Date: 2010-03-24QUANTUM 14
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
QUANTUM 14
Publication Date
2010-03-24
Estimated Expiration
Not applicable · inactive patent

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Abstract

In a state where a silicon base material (1) is used as an anode, a fine platinum member (2) is used as a cathode, and an electrolyte solution (4) is arranged between the anode and the cathode, anodicoxidation is performed in constant current mode under the conditions where porous formation mode and electrolytic polishing mode coexist. The platinum member (2) is fitted in the silicon base material (1) with silicon elution, and processes such as hole making, cutting, single-side pressing are performed. Since the silicon base material can be processed at a room temperature with small energy, the crystal quality of the processing surface is not deteriorated. Thus, efficient and highly accurate processing can be performed without using a mechanical method, which consumes much material in conventional processes such as cutting of solar cell silicon base material, and without using laser whose energy unit cost is high, and furthermore, without leaving a crystal damage on a processed surface.
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Description

technical field

[0001] The present invention relates to a method for processing a silicon substrate, its processed product and a processing device. More specifically, the present invention relates to a method for processing a crystalline silicon substrate useful in the manufacture of precision processed products, transistors, LSIs, solar cells, etc., and a processed product of a crystalline silicon substrate processed by the method, and also uses Its parts and elements, and the processing equipment used to carry out the processing. Background technique

[0002] Among the solar cells provided at the time of solar power generation, crystalline silicon solar cells are the most manufactured and used. However, the current situation is that compared with conventional power generation methods such as thermal power, hydraulic power, and atomic energy, the cost of electricity generated by solar power generation is still high. Therefore, in order to widely spread this renewable energ...

Claims

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