Method for measuring magnitude of white light interferometer with etalon

Abstract

The invention discloses a method for measuring the magnitude of a white light interferometer with an etalon. The method comprises the steps: a parallel light path system with the same clear aperture is additionally arranged in front of a light splitting light path in a light path of the white light interferometer, and the etalon is placed in the parallel light path system; interference fringes ofthe interferometer are adjusted, and two coherent light paths of the interferometer are adjusted to be completely vertical; the distances between two coherent lights from the light splitting point tothe two reference mirrors are adjusted to be equivalent, and a white light zero-order interference band appears; through the adjustment of the reference mirrors and a gauge block workbench, the interference band on steel flat crystal is parallel to the short edge of a measured block, and the zero-order interference band on the measured block passes through the midpoint of the middle part of the measured block; and the distance between the zero-order interference band on the steel flat crystal and the zero-order interference band on the central point of the measured block is measured and corrected. According to the method, the measurement precision of the gauge block is improved, gross errors are avoided, the measurement efficiency is improved, abrasion is avoided, the service life is long,measurement automation and semi-automation are easy to achieve, and many kinds of precision measurement can be conducted.

Description

technical field [0001] The invention belongs to the technical field of length value measurement, and in particular relates to a value measurement method of a white light interferometer with an etalon. Background technique [0002] At present, the research and development of relevant instruments for measuring the center length of the gauge block emerges in an endless stream. So far, there are the following types: 1) Light wave interferometers based on the principle of decimal coincidence. The measuring range of this type of device is divided into two types: Measurement uncertainty up to U 99 =(0.02μm+0.2×10 -6 L), to meet the measurement requirements of 1 equal gauge block; 2) Contact laser gauge block length measuring instrument, the measurement range of this type of device is 0.5-100mm, and can only measure 2, 3 equal gauge blocks; 3) Based on inductance micrometry The main function of the automatic comparator is to replace the traditional subjective judgment with the nak...

AI Technical Summary

Problems solved by technology

In addition, traditional instruments must use reference gauge blocks to achieve traceability of the measured block when transmitting length

This will inevitably cause the wear of the reference gauge block, reduce its accuracy and reduce its life

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