Etching chamber with automatic cleaning function, cleaning component and cleaning method thereof

Abstract

The invention provides an etching chamber having an automatic cleaning function, and a cleaning assembly and a cleaning method thereof. The cleaning assembly is composed of a first spraying mechanism and a second spraying mechanism; the first spraying mechanism is used for spraying an etching solution; and the second spraying mechanism arranged above the first spraying mechanism is used for spraying a cleaning solution when the first spraying mechanism stops spraying the etching solution, thereby cleaning the first spraying mechanism. Therefore, the inside of the etching chamber can be cleaned at any time, so that crystals caused by etching solution volatilization can be reduced and thus any damage caused by the crystals can be reduced.

Description

technical field [0001] The invention relates to the technical field of display terminal manufacturing, in particular to an etching chamber with an automatic cleaning function, a cleaning component, and a cleaning method thereof. Background technique [0002] In the manufacturing process of LCD (Liquid Crystal Display, liquid crystal display), the etching process is a very important part. The etching process uses chemicals to corrode the metal on the surface of the substrate, so as to achieve the purpose of removing part of the metal to form a predetermined pattern. At present, the etching process generally uses volatile oxalic acid solution. When the etching equipment is idle for a long time, the volatile oxalic acid solution is easy to crystallize in the etching chamber. The crystals produced will not only scratch and damage the components to be etched, but also affect the display quality of LCD It may be inhaled by the operator and cause harm to the human body. However, ...

AI Technical Summary

Problems solved by technology

At present, the etching process generally uses volatile oxalic acid solution. When the etching equipment is idle for a long time, the volatile oxalic acid solution is easy to crystallize in the etching chamber. The crystals produced will not only scratch and damage the components to be etched, but also affect the display quality of LCD It may be inhaled by the operator and cause harm to the human body

However, at present, the crystals in the etching chamber can only be cleaned during the maintenance of the etching equipment. This regular cleaning cannot effectively reduce the crystals and the damage caused by the crystals

Images