Micro-displacement positioning platform with three-stage amplifying mechanisms

A positioning platform and three-stage amplification technology, which is applied to the parts and instruments of the instrument, can solve the problems of low displacement amplification ratio and parasitic displacement, and achieve the effects of low processing cost, easy processing, and simple structure and shape.

Active Publication Date: 2017-07-25
SHANGHAI UNIV OF ENG SCI
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Problems solved by technology

[0004] The purpose of the present invention is to provide a micro-displacement positioning platform with a three-stage amplifying mechanism in order to overcome the above-mentioned defects in the prior art. In the technology, the displacement amplification ratio is low and there are problems such as parasitic displacement, so as to realize the large-scale precise positioning of the motion platform

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  • Micro-displacement positioning platform with three-stage amplifying mechanisms
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Embodiment 1

[0025] A micro-displacement positioning platform with a three-stage amplification mechanism, such as Figure 1~2 As shown, it includes a fixed frame (composed of a fixed frame A8, a fixed frame B11 and a fixed frame C15), a displacement input platform 1, a motion input mechanism 2 (a piezoelectric ceramic driver is used in this embodiment), two groups of first Level lever mechanism (first level lever mechanism A21 and first level lever mechanism B25), two groups of second level lever mechanisms (second level lever mechanism A22 and second level lever mechanism B24) and a half-bridge type amplifying mechanism 23, The first-level lever mechanism A21 and the second-level lever mechanism A22 are located on one side of the displacement input platform, the first-level lever mechanism B25 and the second-level lever mechanism B24 are arranged on the other side symmetrical to the input platform, and the first-level lever mechanism The fulcrums of the mechanism and the second-level leve...

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Abstract

The invention relates to a micro-displacement positioning platform with three-stage amplifying mechanisms. The micro-displacement positioning platform comprises a fixed frame, a displacement input platform, a motion input mechanism, two sets of first-grade lever mechanisms, two sets of second-grade lever mechanisms and a semi-axle amplifying mechanism; the two sets of first-grade lever mechanisms and the two sets of second-grade lever mechanisms are symmetrical; fulcrums of the first-grade lever mechanisms and the second-grade lever mechanisms are both in transmission connection with the fixed frame; two ends of the motion input mechanism are respectively connected with the fixed frame and the displacement input platform; input ends of the two sets of first-grade lever mechanisms are respectively in transmission connection with the displacement input platform, and output ends are respectively in transmission connection with input ends of the corresponding second-grade lever mechanisms; and the semi-axle amplifying mechanism is connected between the output ends of the two sets of second-grade lever mechanisms. The micro-displacement positioning platform depends on compound serial connection of two stages of lever mechanisms and one stage of bridge mechanisms to solve such problems as low displacement-amplification ratio and parasitic displacement in the prior art so as to realize wide-range precise positioning of a motion platform.

Description

technical field [0001] The invention belongs to the technical field of precision micro-displacement drive systems, and in particular relates to a micro-displacement positioning platform with a three-stage amplification mechanism. Background technique [0002] The precision positioning platform using piezoelectric ceramic actuators and flexible mechanisms as micro-displacement driving and guiding components, respectively, has been widely used in many fields such as micro-electromechanical systems, scanning probe microscopes, ultra-precision machining, optical adjustment, and biological cell manipulation. However, the output displacement of the piezoelectric ceramic driver is small, and the ratio of the output displacement to its size is only 10 μm / cm. Therefore, in order to meet the application of large displacement, it is usually necessary to use a flexible amplification mechanism to expand its output displacement. Commonly used displacement amplification mechanisms include ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G12B5/00
CPCG12B5/00
Inventor 赖磊捷
Owner SHANGHAI UNIV OF ENG SCI
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